PLASMA-REACTOR AND ITS USE IN ETCHING AND COATING SUBSTRATES
KRAUS, GEORG, HINKEL, HOLGER, KUENZEL, ULRICH, KAUS, GERHARD-MIN, MUHL, REINHOLD
Year of Publication 20.08.1986
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Year of Publication 20.08.1986
Patent
Plasma-reactor and its use in etching and coating substrates
KRAUS, GEORG, HINKEL, HOLGER, KAUS, GERHARD-MIN, KUNZEL, ULRICH, MUHL, REINHOLD
Year of Publication 28.09.1983
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Year of Publication 28.09.1983
Patent