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Conference Proceeding
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Published in Journal of the Electrochemical Society (2008)
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SEMICONDUCTOR DEVICE AND FABRICATING METHOD THEREOF TO IMPROVE RELIABILITY OF BURIED INTERCONNECTION INCLUDING MAIN CONDUCTIVE LAYER WHOSE MAIN COMPONENT IS COPPER
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Year of Publication 06.10.2004
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Year of Publication 06.10.2004
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Year of Publication 08.08.2019
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Year of Publication 08.08.2019
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Katsuyama, Kiyomi, Oshima, Takayuki, Miura, Noriko, Tamaru, Tsuyoshi, Noguchi, Junji, Yamaguchi, Hizuru, Saito, Tatsuyuki, Ishikawa, Kensuke, Iwasaki, Tomio
Year of Publication 28.05.2019
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Year of Publication 28.05.2019
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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Year of Publication 31.01.2019
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Year of Publication 31.01.2019
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Semiconductor device and manufacturing method thereof
Katsuyama, Kiyomi, Oshima, Takayuki, Miura, Noriko, Tamaru, Tsuyoshi, Noguchi, Junji, Yamaguchi, Hizuru, Saito, Tatsuyuki, Ishikawa, Kensuke, Iwasaki, Tomio
Year of Publication 06.11.2018
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Year of Publication 06.11.2018
Patent
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
OSHIMA Takayuki, YAMAGUCHI Hizuru, SAITO Tatsuyuki, NOGUCHI Junji, KATSUYAMA Kiyomi, TAMARU Tsuyoshi, MIURA Noriko, IWASAKI Tomio, ISHIKAWA Kensuke
Year of Publication 15.02.2018
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Year of Publication 15.02.2018
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Semiconductor device and manufacturing method thereof
Oshima Takayuki, Miura Noriko, Ishikawa Kensuke, Saito Tatsuyuki, Noguchi Junji, Katsuyama Kiyomi, Iwasaki Tomio, Tamaru Tsuyoshi, Yamaguchi Hizuru
Year of Publication 14.11.2017
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Year of Publication 14.11.2017
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
OSHIMA Takayuki, YAMAGUCHI Hizuru, SAITO Tatsuyuki, NOGUCHI Junji, KATSUYAMA Kiyomi, TAMARU Tsuyoshi, MIURA Noriko, IWASAKI Tomio, ISHIKAWA Kensuke
Year of Publication 13.07.2017
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Year of Publication 13.07.2017
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Semiconductor device and manufacturing method thereof
Oshima Takayuki, Miura Noriko, Ishikawa Kensuke, Saito Tatsuyuki, Noguchi Junji, Katsuyama Kiyomi, Iwasaki Tomio, Tamaru Tsuyoshi, Yamaguchi Hizuru
Year of Publication 23.05.2017
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Year of Publication 23.05.2017
Patent
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
OSHIMA Takayuki, YAMAGUCHI Hizuru, SAITO Tatsuyuki, NOGUCHI Junji, KATSUYAMA Kiyomi, TAMARU Tsuyoshi, MIURA Noriko, IWASAKI Tomio, ISHIKAWA Kensuke
Year of Publication 12.01.2017
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Year of Publication 12.01.2017
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In-situ After-treatment Using Low-energy Dry-etching with a CF 4 /O 2 Gas Mixture to Remove Reactive Ion Etching Damage
Matsui, Miyako, Uchida, Fumihiko, Kojima, Masayuki, Tokunaga, Takafumi, Yamazaki, Kazuo, Katsuyama, Kiyomi, Arai, Hiromasa
Published in Japanese Journal of Applied Physics (01.04.1998)
Published in Japanese Journal of Applied Physics (01.04.1998)
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Semiconductor device and manufacturing method thereof
Oshima Takayuki, Miura Noriko, Ishikawa Kensuke, Saito Tatsuyuki, Noguchi Junji, Katsuyama Kiyomi, Iwasaki Tomio, Tamaru Tsuyoshi, Yamaguchi Hizuru
Year of Publication 08.11.2016
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Year of Publication 08.11.2016
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Transistor with MIM (Metal-Insulator-Metal) capacitor
SATO KIYOHIKO, OTAGURO AKIRA, ISHII YUKINO, MAENO RYOHEI, KATSUYAMA KIYOMI, FUJIWARA TSUYOSHI, SATO HIDENORI, MATSUMOTO DAICHI
Year of Publication 13.01.2015
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Year of Publication 13.01.2015
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
MIURA NORIKO, NOGUCHI JUNJI, TAMARU TSUYOSHI, ISHIKAWA KENSUKE, KATSUYAMA KIYOMI, SAITO TATSUYUKI, IWASAKI TOMIO, OSHIMA TAKAYUKI, YAMAGUCHI HIZURU
Year of Publication 20.08.2015
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Year of Publication 20.08.2015
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Semiconductor device and manufacturing method thereof
MIURA NORIKO, NOGUCHI JUNJI, TAMARU TSUYOSHI, ISHIKAWA KENSUKE, KATSUYAMA KIYOMI, SAITO TATSUYUKI, IWASAKI TOMIO, OSHIMA TAKAYUKI, YAMAGUCHI HIZURU
Year of Publication 23.06.2015
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Year of Publication 23.06.2015
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Method of manufacturing a semiconductor device
ANDO, TOSHIO, HIRUMA, KENJI, SATOH, KIYOHIKO, KAKUTA, KAZUYUKI, KATSUYAMA, KIYOMI, IIDA, YASUSHI, ONOZUKA, TOSHIHIKO
Year of Publication 06.11.2013
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Year of Publication 06.11.2013
Patent