DECOMPOSITION PRODUCTS OF EBR-9 BY X-RAY AND EB EXPOSURE
TOKUNAGA, ATSUTO, KATAOKA, MUTSUO, NAKAYAMA, YOICHI, SOEDA, FUSAMI
Published in Journal of Photopolymer Science and Technology (1992)
Published in Journal of Photopolymer Science and Technology (1992)
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Journal Article
POSITIVE ELECTRON-BEAM RESIST COMPOSITION AND DEVELOPER FOR POSITIVE ELECTRON-BEAM RESIST
TAMURA, KAZUTAKA, ASANO, MASAYA, KANETSUKI, SHIGEYOSHI, KATAOKA, MUTSUO +DI, OOSEDO, HIROKI
Year of Publication 10.11.1994
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Year of Publication 10.11.1994
Patent