Developer for a positive electron beam resist composition
TAMURA, KAZUTAKA, KATAOKA, MUTSUO, ASANO, MASAYA, KANETSUKI, SHIGEYOSHI, OOSEDO, HIROKI
Year of Publication 10.07.2002
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Year of Publication 10.07.2002
Patent
QUINONEDIAZIDE/NOVOLAK POSITIVE ELECTRON BEAM RESIST DEVELOPER
TAMURA, KAZUTAKA, KATAOKA, MUTSUO, ASANO, MASAYA, KANETSUKI, SHIGEYOSHI, OOSEDO, HIROKI
Year of Publication 15.10.1999
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Year of Publication 15.10.1999
Patent
Quinonediazide/novolak positive electron beam resist developer
KANETSUKI; SHIGEYOSHI, TAMURA; KAZUTAKA, ASANO; MASAYA, OOSEDO; HIROKI, KATAOKA MUTSUO
Year of Publication 22.12.1998
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Year of Publication 22.12.1998
Patent
Developer for a positive electron beam resist composition
TAMURA, KAZUTAKA, KATAOKA, MUTSUO, ASANO, MASAYA, KANETSUKI, SHIGEYOSHI, OOSEDO, HIROKI
Year of Publication 28.10.1998
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Year of Publication 28.10.1998
Patent