Building of super high-efficiency processing technology based on innovative concept (Establishment of effective polishing process of SiC substrate using Dilatancy pad tool with bowl feed method)
DOI, Toshiro K., SESHIMO, Kiyoshi, YAMAZAKI, Tsutomu, OHTSUBO, Masanori, NISHIZAWA, Hideaki, MURAKAMI, Sachi, ICHIKAWA, Daizo, NAKAMURA, Yoshio, MIYASHITA, Tadakazu, KAWAMURA, Yoshihide, TAKAGI, Masataka, KASHIWADA, Hiroshi, AIDA, Hideo
Published in Kikai Gakkai ronbunshū = Transactions of the Japan Society of Mechanical Engineers (2015)
Published in Kikai Gakkai ronbunshū = Transactions of the Japan Society of Mechanical Engineers (2015)
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Year of Publication 11.10.2022
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Polishing pad and method for producing the same, and method for producing polished product
Narada, Yousuke, Tokushige, Shin, Koike, Kenichi, Kashiwada, Hiroshi, Yamada, Tatsuya, Nakase, Keisuke
Year of Publication 31.01.2023
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Year of Publication 31.01.2023
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