할로겐-함유 증착 억제제들을 사용하는 리세스된 피처들 내 금속들의 증착
KARIM ISHTAK, GRIFFITHS MATTHEW BERTRAM EDWARD, MANDIA DAVID JOSEPH, LAI CHIUKIN STEVEN, BLAKENEY KYLE JORDAN
Year of Publication 16.08.2024
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Year of Publication 16.08.2024
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DYNAMIC PRECURSOR DOSING FOR ATOMIC LAYER DEPOSITION
KARIM ISHTAK, KUMAR PURUSHOTTAM, KANG HU, LAVOIE ADRIEN, QIAN JUN, OU FUNG SUONG
Year of Publication 27.08.2024
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Year of Publication 27.08.2024
Patent
VARIABLE TEMPERATURE HARDWARE AND METHODS FOR REDUCTION OF WAFER BACKSIDE DEPOSITION
KARIM ISHTAK, CHANDRASEKHARAN RAMESH, KANG HU, KUMAR PURUSHOTTAM, LAVOIE ADRIEN, QIAN JUN
Year of Publication 08.08.2023
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Year of Publication 08.08.2023
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탄소 기반 막의 공간적으로 선택적인 애싱 (ashing) 을 사용하여 증착 유도된 CD 불균형을 개선하는 방법
KARIM ISHTAK, KUMAR PURUSHOTTAM, AGARWAL PULKIT, ABEL JOSEPH, LAVOIE ADRIEN
Year of Publication 09.07.2020
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Year of Publication 09.07.2020
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PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
CHANDRASEKHARAN RAMESH, BREILING PATRICK, BALDASSERONI CHLOE, PASQUALE FRANK, KONKOLA PAUL, LEESER KARL, KIM SUNG JE, KARIM ISHTAK, MINSHALL EDMUND, SAKIYAMA YUKINORI, DUVALL ANDREW, SWAMINATHAN SHANKAR, LAVOIE ADRIEN
Year of Publication 01.12.2023
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Year of Publication 01.12.2023
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시일 표면을 갖는 정전 척
ROBERTS MICHAEL PHILIP, KARIM ISHTAK, CHANDRASEKHARAN RAMESH, BALDASSERONI CHLOE, BREILING PATRICK G, LAVOIE ADRIEN
Year of Publication 19.11.2020
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Year of Publication 19.11.2020
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HIGH DRY ETCH RATE MATERIALS FOR SEMICONDUCTOR PATTERNING APPLICATIONS
KARIM ISHTAK, KUMAR PURUSHOTTAM, MAHOROWALA ARPAN, SWAMINATHAN SHANKAR, LAVOIE ADRIEN
Year of Publication 08.03.2018
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Year of Publication 08.03.2018
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PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAYS AND SIDE CONTAINMENT
CHANDRASEKHARAN RAMESH, BREILING PATRICK, BALDASSERONI CHLOE, PASQUALE FRANK, KONKOLA PAUL, LEESER KARL, KIM SUNG JE, KARIM ISHTAK, MINSHALL EDMUND, SAKIYAMA YUKINORI, DUVALL ANDREW, SWAMINATHAN SHANKAR, LAVOIE ADRIEN
Year of Publication 17.08.2022
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Year of Publication 17.08.2022
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반도체 프로세싱을 위해 원뿔형 웨이퍼 센터링 및 홀딩 디바이스
KIM SUNG JE, KARIM ISHTAK, KUMAR PURUSHOTTAM, BREILING PATRICK, AGARWAL PULKIT, LAVOIE ADRIEN
Year of Publication 31.07.2019
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Year of Publication 31.07.2019
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