Determination of Cross-Link Density in Ion-Irradiated Polystyrene Surfaces from Rippling
Karade, Yogesh, Pihan, Sascha A, Brünger, Wilhelm H, Dietzel, Andreas, Berger, Rüdiger, Graf, Karlheinz
Published in Langmuir (03.03.2009)
Published in Langmuir (03.03.2009)
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Journal Article
Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates
Karade, Yogesh, Madani-Grasset, Frédéric, Berger, Rüdiger, Csiba, Vojtech, Rommel, Mathias, Dietzel, Andreas
Published in Microelectronic engineering (01.05.2010)
Published in Microelectronic engineering (01.05.2010)
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Conference Proceeding
OBJECT HOLDER AND METHOD OF MANUFACTURING AN OBJECT HOLDER
NELLISSEN ANTONIUS JOHANNES MARIA, KARADE YOGESH, FILIPPI MATTEO, VAN DER WILK RONALD, VAN DOREMALEN HENDRIKUS CHRISTOFFEL MARIA, WELTERS WILHELMUS JACOBUS JOHANNES, ACHANTA SATISH, LAFARRE RAYMOND WILHELMUS LOUIS
Year of Publication 07.12.2015
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Year of Publication 07.12.2015
Patent
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING SUBSTRATE HOLDER
RIJSSEN JACOBS JOSEPHS, NICOLAAS TEN KATE, TROMP SIEGFLIED ALEXANDER, RAYMOND WILHELMUS LOUIS LAFARRE, DZIOMKINA NINA VLADIMIROVNA, KARADE YOGESH PRAMOD, FITZ MAURICE WILHELMS LEONARDS HENDRIX, RHODENBURUK ELIZABETH COLIN, HENDRIK HUISMAN
Year of Publication 04.12.2014
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Year of Publication 04.12.2014
Patent
Oriented nanometer surface morphologies by thermal relaxation of locally cross-linked and stretched polymer samples
Karade, Yogesh, Graf, Karlheinz, Brünger, Wilhelm H., Dietzel, Andreas, Berger, Rüdiger
Published in Microelectronic engineering (01.05.2007)
Published in Microelectronic engineering (01.05.2007)
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Conference Proceeding
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
RODENBURG, Elisabeth Corinne, TEN KATE, Nicolaas, KARADE, Yogesh Pramod, LAFARRE, Raymond Wilhelmus Louis, DZIOMKINA, Nina Vladimirovna, DONDERS, Sjoerd Nicolaas Lambertus
Year of Publication 08.08.2024
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Year of Publication 08.08.2024
Patent
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
LEIJSSEN JACOBUS JOSEPHUS, TROMP SIEGFRIED ALEXANDER, FEIJTS MAURICE WILHELMUS LEONARDUS HENDRICUS, DZIOMKINA NINA VLADIMIROVNA, KARADE YOGESH PRAMOD, RODENBURG ELISABETH CORINNE, LAFARRE RAYMOND WILHELMUS LOUIS, HUISMAN HENDRIK, TEN KATE NICOLAAS
Year of Publication 28.08.2012
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Year of Publication 28.08.2012
Patent
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
Dziomkina, Nina Vladimirovna, Lafarre, Raymond Wilhelmus Louis, Rodenburg, Elisabeth Corinne, Karade, Yogesh Pramod, Donders, Sjoerd Nicolaas Lambertus, Ten Kate, Nicolaas
Year of Publication 16.04.2024
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Year of Publication 16.04.2024
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SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
Dziomkina, Nina Vladimirovna, Lafarre, Raymond Wilhelmus Louis, Rodenburg, Elisabeth Corinne, Karade, Yogesh Pramod, Donders, Sjoerd Nicolaas Lambertus, Ten Kate, Nicolaas
Year of Publication 10.08.2023
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Year of Publication 10.08.2023
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Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
Dziomkina, Nina Vladimirovna, Lafarre, Raymond Wilhelmus Louis, Rodenburg, Elisabeth Corinne, Karade, Yogesh Pramod, Donders, Sjoerd Nicolaas Lambertus, Ten Kate, Nicolaas
Year of Publication 18.04.2023
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Year of Publication 18.04.2023
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