Substrate holder and lithographic equipment
DONDERS SJOERD, KARADE YOGESH, LAFARRE RAYMOND, DZIOMKINA NINA, RODENBURG ELISABETH, TEN KATE NICOLAAS
Year of Publication 01.02.2019
Get full text
Year of Publication 01.02.2019
Patent
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
LEIJSSEN JACOBUS JOSEPHUS, TROMP SIEGFRIED ALEXANDER, FEIJTS MAURICE WILHELMUS LEONARDUS HENDRICUS, DZIOMKINA NINA VLADIMIROVNA, KARADE YOGESH PRAMOD, RODENBURG ELISABETH CORINNE, LAFARRE RAYMOND WILHELMUS LOUIS, HUISMAN HENDRIK, TEN KATE NICOLAAS
Year of Publication 16.06.2016
Get full text
Year of Publication 16.06.2016
Patent
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
LEIJSSEN JACOBUS JOSEPHUS, TROMP SIEGFRIED ALEXANDER, FEIJTS MAURICE WILHELMUS LEONARDUS HENDRICUS, DZIOMKINA NINA VLADIMIROVNA, KARADE YOGESH PRAMOD, RODENBURG ELISABETH CORINNE, LAFARRE RAYMOND WILHELMUS LOUIS, HUISMAN HENDRIK, TEN KATE NICOLAAS
Year of Publication 09.02.2016
Get full text
Year of Publication 09.02.2016
Patent
OBJECT HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING AN OBJECT HOLDER
VAN DOREMALEN, HENDRIKUS, CHRISTOFFEL, MARIA, WELTERS, WILHELMUS, FILIPPI, MATTEO, VAN DER WILK, RONALD, NELLISSEN, ANTONIUS, LAFARRE, RAYMOND, KARADE, YOGESH, ACHANTA, SATISH
Year of Publication 02.10.2014
Get full text
Year of Publication 02.10.2014
Patent
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
DAMEN JOHANNES WILHELMUS, BRINKHOF EUGENE MARIA, KARADE YOGESH PRAMOD, BEX JAN, LAFARRE RAYMOND WILHELMUS LOUIS, TEN KATE NICOLAAS
Year of Publication 01.11.2012
Get full text
Year of Publication 01.11.2012
Patent
Substrate holder, lithographic apparatus, and method of manufacturing a substrate holder
DZIOMKINA, NINA, RODENBURG, ELISABETH, LAFARRE, RAYMOND, LEIJSSEN, JACOBUS, HUISMAN, HENDRIK, TROMP, SIEGFRIED, KARADE, YOGESH, TEN KATE, NICOLAAS, FEIJTS, MAURICE
Year of Publication 22.08.2012
Get full text
Year of Publication 22.08.2012
Patent
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
LAFARRE, RAYMOND, WILHELMUS, LOUIS, LEIJSSEN, JACOBUS, JOSEPHUS, RODENBURG, ELISABETH, CORINNE, HUISMAN, HENDRIK, KARADE, YOGESH, PRAMOD, DZIOMKINA, NINA, VLADIMIROVNA, TROMP, SIEGFRIED, ALEXANDER, TEN KATE, NICOLAAS, FEIJTS, MAURICE, WILHELMUS, LEONARDUS, HENDRICUS
Year of Publication 27.09.2012
Get full text
Year of Publication 27.09.2012
Patent
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING SUBSTRATE HOLDER
RIJSSEN JACOBS JOSEPHS, KATE NICOLAAS TEN, TROMP SIEGFLIED ALEXANDER, DZIOMKINA NINA VLADIMIROVNA, KARADE YOGESH PRAMOD, FITZ MAURICE WILHELMS LEONARDS HENDRIX, RHODENBURUK ELIZABETH COLIN, LAFARRE RAYMOND WILHELMUS LOUIS, HENDRIK HUISMAN
Year of Publication 10.09.2012
Get full text
Year of Publication 10.09.2012
Patent
SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
DZIOMKLNA NINA VLADIMIROVNA, LEIJSSEN JACOBUS JOSEPHUS, TROMP SIEGFRIED ALEXANDER, KATE NICOLAAS TEN, FEIJTS MAURICE WILHELMUS LEONARDUS HENDRIC, KARADE YOGESH PRAMOD, RODENBURG ELISABETH CORINNE, LAFARRE RAYMOND WILHELMUS LOUIS, HUISMAN HENDRIK
Year of Publication 23.08.2012
Get full text
Year of Publication 23.08.2012
Patent
Substrate holder and method of manufacturing a substrate holder
DONDERS SJOERD, KARADE YOGESH, LAFARRE RAYMOND, DZIOMKINA NINA, RODENBURG ELISABETH, TEN KATE NICOLAAS
Year of Publication 01.10.2014
Get full text
Year of Publication 01.10.2014
Patent
Method for manufacturing substrate holder
RIJSSEN JACOBS JOSEPHS, KATE NICOLAAS TEN, TROMP SIEGFLIED ALEXANDER, DZIOMKINA NINA VLADIMIROVNA, KARADE YOGESH PRAMOD, FITZ MAURICE WILHELMS LEONARDS HENDRIX, RHODENBURUK ELIZABETH COLIN, LAFARRE RAYMOND WILHELMUS LOUIS, HUISMAN HENDRIK
Year of Publication 03.08.2016
Get full text
Year of Publication 03.08.2016
Patent