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"KAPLAN, ROLAND"
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"KAPLAN, ROLAND"
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METHOD AND DEVICE FOR IMAGING A RADIATION-SENSITIVE SUBSTRATE
by
WIJNAENDTS VAN RESANDT, Roelof
,
KAPLAN
,
Roland
Year of Publication
02.01.2019
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Method and arrangement for displacement
by
KAPLAN ROLAND
,
FANGERAU MICHAEL
,
MANGOLD ALEXANDER
Year of Publication
03.11.2015
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Method and device for imaging a radiation-sensitive substrate
by
KAPLAN ROLAND
,
WYNAENDTS VAN RESANDT ROELOF
Year of Publication
17.06.2015
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Method and device for imaging a radiation-sensitive substrate
by
KAPLAN ROLAND
,
WIJNAENDTS VAN RESANDT ROELOF
Year of Publication
09.06.2015
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METHOD AND APPARATUS FOR DISPLACEMENT
by
ALEXANDER MANGOLD
,
ROLAND KAPLAN
,
MICHAEL FANGERAU
Year of Publication
24.04.2014
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Verfahren und Anordnung zur Verschiebung
by
Kaplan
,
Roland
,
Fangerau, Michael
,
Mangold, Alexander
Year of Publication
25.07.2019
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METHOD AND DEVICE FOR IMAGING A RADIATION-SENSITIVE SUBSTRATE
by
KAPLAN ROLAND
,
WIJNAENDTS VAN RESANDT ROELOF
Year of Publication
10.11.2011
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METHOD AND DEVICE FOR IMAGING A RADIATION-SENSITIVE SUBSTRATE
by
WIJNAENDTS VAN RESANDT, ROELOF
,
KAPLAN
,
ROLAND
Year of Publication
17.08.2011
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VERFAHREN UND ANORDNUNG ZUR VERSCHIEBUNG
by
MANGOLD, ALEXANDER
,
FANGERAU, MICHAEL
,
KAPLAN
,
ROLAND
Year of Publication
15.07.2011
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Method and arrangement for displacement
by
MANGOLD, ALEXANDER
,
FANGERAU, MICHAEL
,
KAPLAN
,
ROLAND
Year of Publication
22.06.2011
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Method and device for imaging a mask onto a substrate
by
KAPLAN ROLAND
,
SOLLNER JUERGEN
Year of Publication
24.08.2005
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METHOD AND ARRANGEMENT FOR DISPLACEMENT
by
KAPLAN ROLAND
,
FANGERAU MICHAEL
,
MANGOLD ALEXANDER
Year of Publication
13.01.2011
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Method and device for imaging a mask onto a substrate
by
KAPLAN ROLAND
,
SOLLNER JUERGEN
Year of Publication
09.06.2005
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Method and arrangement for displacement
by
MANGOLD, ALEXANDER
,
FANGERAU, MICHAEL
,
KAPLAN
,
ROLAND
Year of Publication
24.11.2010
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Method and apparatus for reproducing a programmable mask on a substrate
by
DIEZ STEFFEN
,
KAPLAN ROLAND
,
MANGOLD ALEXANDER
,
BECKER UDO
Year of Publication
05.03.2013
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Method and device for imaging a mask onto a substrate
by
SOLLNER, JUERGEN
,
KAPLAN
,
ROLAND
Year of Publication
05.01.2005
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VERFAHREN ZUR ERZEUGUNG VON MIKROBOHRUNGEN
by
VOGLER, SVEN
,
KAPLAN
,
ROLAND
Year of Publication
15.12.2003
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METHOD OF PRODUCING MICROBORE HOLES
by
VOGLER, SVEN
,
KAPLAN
,
ROLAND
Year of Publication
03.12.2003
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Forming image of mask on substrate for photolithography involves moving illumination and optical units relative to mask and substrate, forming image depending on detected substrate distortions
by
SOLLNER, JUERGEN
,
KAPLAN
,
ROLAND
Year of Publication
20.11.2003
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Apparatus for producing microbore holes
by
KAPLAN ROLAND
,
VOGLER SVEN
Year of Publication
28.10.2003
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