DC, RF 마그네트론 코스퍼터링법으로 증착한 ZTO/GZO 투명전도성막의 열처리 조건이 박막의 물성에 미치는 영향
오성훈, 강세원, 이건환, 정우석, 송풍근, Oh, Sung-Hoon, Kang, Sae-Won, Lee, Gun-Hwan, Jung, Woo-Seok, Song, Pung-Keun
Published in 한국표면공학회지 (01.06.2012)
Published in 한국표면공학회지 (01.06.2012)
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Journal Article
Effect of Annealing on the Electrical Property and Water Permeability of ZTO/GZO Double-layered TCO Films Deposited by DC, RF Magnetron Co-sputtering
Oh, Sung-Hoon, Kang, Sae-Won, Lee, Gun-Hwan, Jung, Woo-Seok, Song, Pung-Keun
Published in Journal of the Korean institute of surface engineering (30.06.2012)
Published in Journal of the Korean institute of surface engineering (30.06.2012)
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Journal Article