Poly-Si Thin Film by ICP-CVD and ELA at 150°C For Flexible Substrates
Han, Sang-Myeon, Lee, Min-Cheol, Kang, Su-Hyuk, You, Bong-Hyun, Han, Min-Koo
Published in Physica scripta (01.01.2004)
Published in Physica scripta (01.01.2004)
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