Non-contact etch annealing of strained layers
Malik, Igor J, Kang, Sien G, Fuerfanger, Martin, Kirk, Harry, Flat, Ariel, Current, Michael Ira, Ong, Philip James
Year of Publication 29.05.2012
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Year of Publication 29.05.2012
Patent
Non-contact etch annealing of strained layers
ONG PHILIP JAMES, KIRK HARRY, FLAT ARIEL, CURRENT MICHAEL IRA, KANG SIEN G, MALIK IGOR J, FUERFANGER MARTIN
Year of Publication 29.05.2012
Get full text
Year of Publication 29.05.2012
Patent