Effects of laser drilling through silicon substrate on MOSFET device characteristics
Youngkyu Song, Chulhyun Park, Junghan Kang, Ik-Bu Sohn, Young-Chul Noh, Jongmin Lee, Eung Jang Lee, Seung-Han Park, Soogil Lee, Jongill Hong, Ilgu Yun
Published in 2010 3rd International Nanoelectronics Conference (INEC) (01.01.2010)
Published in 2010 3rd International Nanoelectronics Conference (INEC) (01.01.2010)
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