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Year of Publication 07.05.2024
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Year of Publication 01.04.2024
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Year of Publication 20.05.2024
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Year of Publication 20.05.2024
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GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS
KANARIK KEREN JACOBS, YANG WENBING, TAN SAMANTHA, OHBA TOMIHITO, MARKS JEFFREY, NOJIRI KAZUO
Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
CHANDRASHEKAR ANAND, KANARIK KEREN JACOBS, WOOD MICHAEL, YANG WENBING, LAI CHIUKIN STEVEN, TAN SAMANTHA, SU TEH TIEN, DANEK MICHAL
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Year of Publication 09.01.2023
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내화성 금속들 및 다른 고 표면 결합 에너지 재료들의 원자 층 에칭 및 평활화 (smoothing)
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Year of Publication 11.11.2020
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Year of Publication 11.11.2020
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Year of Publication 18.05.2020
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Year of Publication 18.05.2020
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ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
CHANDRASHEKAR ANAND, KANARIK KEREN JACOBS, WOOD MICHAEL, YANG WENBING, LAI CHIUKIN STEVEN, TAN SAMANTHA, SU TEH TIEN, DANEK MICHAL
Year of Publication 08.03.2022
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Year of Publication 08.03.2022
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ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
CHANDRASHEKAR ANAND, KANARIK KEREN JACOBS, WOOD MICHAEL, YANG WENBING, LAI CHIUKIN STEVEN, TAN SAMANTHA, SU TEH TIEN, DANEK MICHAL
Year of Publication 19.10.2021
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Year of Publication 19.10.2021
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ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL
CHANDRASHEKAR ANAND, KANARIK KEREN JACOBS, WOOD MICHAEL, YANG WENBING, LAI CHIUKIN STEVEN, TAN SAMANTHA, SU TEH TIEN, DANEK MICHAL
Year of Publication 19.10.2021
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Year of Publication 19.10.2021
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ALE ALE SMOOTHNESS: IN AND OUTSIDE SEMICONDUCTOR INDUSTRY
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Year of Publication 20.03.2017
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Year of Publication 20.03.2017
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ATOMIC LAYER ETCHING OF TUNGSTEN AND OTHER METALS
KANARIK KEREN JACOBS, KIM, TAE SEUNG, YANG WENBING, LILL THORSTEN, TAN SAMANTHA, SHEN MEIHUA, MARKS JEFFREY
Year of Publication 02.03.2017
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Year of Publication 02.03.2017
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ALEATOMIC LAYER ETCHING FOR ENHANCED BOTTOM-UP FEATURE FILL
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Year of Publication 31.01.2018
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Year of Publication 31.01.2018
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GaN III-V ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS
KANARIK KEREN JACOBS, YANG WENBING, TAN SAMANTHA, OHBA TOMIHITO, MARKS JEFFREY, NOJIRI KAZUO
Year of Publication 14.12.2016
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Year of Publication 14.12.2016
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