Proximity effect correction for electron beam lithography : Highly accurate correction method
KAMIKUBO, T, ABE, T, TOJO, T, OOGI, S, ANZE, H, SHIMIZU, M, ITOH, M, NAKASUGI, T, TAKIGAWA, T, IIJIMA, T, HATTORI, Y
Published in Japanese Journal of Applied Physics (01.12.1997)
Published in Japanese Journal of Applied Physics (01.12.1997)
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Conference Proceeding
Journal Article
High-Speed Convolution System for Real-Time Proximity Effect Correction
Susumu Oogi, Susumu Oogi, Takiji Ishimura, Takiji Ishimura, Takashi Kamikubo, Takashi Kamikubo, Mitsuko Shimizu, Mitsuko Shimizu, Yoshiaki Hattori, Yoshiaki Hattori, Tomohiro Iijima, Tomohiro Iijima, Hirohito Anze, Hirohito Anze, Takayuki Abe, Takayuki Abe, Toru Tojo, Toru Tojo, Tadahiro Takigawa, Tadahiro Takigawa
Published in Japanese Journal of Applied Physics (01.12.1998)
Published in Japanese Journal of Applied Physics (01.12.1998)
Get full text
Journal Article