Atomically flattening of Si surface of silicon on insulator and isolation-patterned wafers
Goto, Tetsuya, Kuroda, Rihito, Akagawa, Naoya, Suwa, Tomoyuki, Teramoto, Akinobu, Li, Xiang, Obara, Toshiki, Kimoto, Daiki, Sugawa, Shigetoshi, Ohmi, Tadahiro, Kamata, Yutaka, Kumagai, Yuki, Shibusawa, Katsuhiko
Published in Japanese Journal of Applied Physics (01.04.2015)
Published in Japanese Journal of Applied Physics (01.04.2015)
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Journal Article
Experimental Investigation of Effect of Channel Doping Concentration on Random Telegraph Signal Noise
Abe, Kenichi, Teramoto, Akinobu, Watabe, Shunichi, Fujisawa, Takafumi, Sugawa, Shigetoshi, Kamata, Yutaka, Shibusawa, Katsuhiko, Ohmi, Tadahiro
Published in Japanese Journal of Applied Physics (01.04.2010)
Published in Japanese Journal of Applied Physics (01.04.2010)
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Journal Article
Introduction of Atomically Flattening of Si Surface to Large-Scale Integration Process Employing Shallow Trench Isolation
Goto, Tetsuya, Kuroda, Rihito, Akagawa, Naoya, Suwa, Tomoyuki, Teramoto, Akinobu, Li, Xiang, Obara, Toshiki, Kimoto, Daiki, Sugawa, Shigetoshi, Kamata, Yutaka, Kumagai, Yuki, Shibusawa, Katsuhiko
Published in ECS journal of solid state science and technology (01.01.2016)
Published in ECS journal of solid state science and technology (01.01.2016)
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Journal Article
Low Temperature Atomically Flattening of Si Surface of Shallow Trench Isolation Pattern
Goto, Tetsuya, Kuroda, Rihito, Suwa, Tomoyuki, Teramoto, Akinobu, Akagawa, Naoya, Kimoto, Daiki, Sugawa, Shigetoshi, Ohmi, Tadahiro, Kamata, Yutaka, Kumagai, Yuki, Shibusawa, Katsuhiko
Published in ECS transactions (27.03.2015)
Published in ECS transactions (27.03.2015)
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Journal Article
A High Near-Infrared Sensitivity Over 70-dB SNR CMOS Image Sensor With Lateral Overflow Integration Trench Capacitor
Murata, Maasa, Sugawa, Shigetoshi, Kuroda, Rihito, Fujihara, Yasuyuki, Otsuka, Yusuke, Shibata, Hiroshi, Shibaguchi, Taku, Kamata, Yutaka, Miura, Noriyuki, Kuriyama, Naoya
Published in IEEE transactions on electron devices (01.04.2020)
Published in IEEE transactions on electron devices (01.04.2020)
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Pharmacists’ Awareness of the Importance of Folic Acid Intake for the Prevention of Neural Tube Defects
Obara, Taku, Murai, Yuriko, Igari, Yukie, Hara, Azusa, Kishikawa, Yukinaga, Hayasaka, Masataka, Kamata, Yutaka, Mano, Nariyasu, Takahashi, Masanobu, Oide, Sentaro, Kitamura, Tetsuji
Published in Iyakuhin Johogaku (2012)
Published in Iyakuhin Johogaku (2012)
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