Microstructural analysis of an epitaxial AlN thick film/trench-patterned template by three-dimensional reciprocal lattice space mapping technique
Kamada, Shohei, Takeuchi, Shotaro, Khan, Dinh Thanh, Miyake, Hideto, Hiramatsu, Kazumasa, Imai, Yasuhiko, Kimura, Shigeru, Sakai, Akira
Published in Applied physics express (01.11.2016)
Published in Applied physics express (01.11.2016)
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IMAGE PROCESSING SYSTEM, DIMENSIONAL MEASUREMENT SYSTEM, IMAGE PROCESSING METHOD, AND PROGRAM
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Year of Publication 07.03.2024
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KAMADA, Shohei, OKADA, Norikazu, ISHIKAWA, Tomohiro, YAMASHITA, Mitsuyoshi
Year of Publication 13.02.2020
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Year of Publication 13.02.2020
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Positional dependence of defect distribution in semipolar hydride vapor phase epitaxy-GaN films grown on patterned sapphire substrates
Uchiyama, Toshiro, Takeuchi, Shotaro, Kamada, Shohei, Arauchi, Takuji, Hashimoto, Yasuhiro, Yamane, Keisuke, Okada, Narihito, Imai, Yasuhiko, Kimura, Shigeru, Tadatomo, Kazuyuki, Sakai, Akira
Published in Japanese Journal of Applied Physics (01.05.2016)
Published in Japanese Journal of Applied Physics (01.05.2016)
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Journal Article