Volatile and Thermally Stable Mid to Late Transition Metal Complexes Containing α‑Imino Alkoxide Ligands, a New Strongly Reducing Coreagent, and Thermal Atomic Layer Deposition of Ni, Co, Fe, and Cr Metal Films
Kalutarage, Lakmal C, Martin, Philip D, Heeg, Mary Jane, Winter, Charles H
Published in Journal of the American Chemical Society (28.08.2013)
Published in Journal of the American Chemical Society (28.08.2013)
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Journal Article
Synthesis, Structure, and Solution Reduction Reactions of Volatile and Thermally Stable Mid to Late First Row Transition Metal Complexes Containing Hydrazonate Ligands
Kalutarage, Lakmal C, Martin, Philip D, Heeg, Mary Jane, Winter, Charles H
Published in Inorganic chemistry (06.05.2013)
Published in Inorganic chemistry (06.05.2013)
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Journal Article
Volatility and High Thermal Stability in Mid-to-Late First-Row Transition-Metal Complexes Containing 1,2,5-Triazapentadienyl Ligands
Kalutarage, Lakmal C, Heeg, Mary Jane, Martin, Philip D, Saly, Mark J, Kuiper, David S, Winter, Charles H
Published in Inorganic chemistry (04.02.2013)
Published in Inorganic chemistry (04.02.2013)
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Journal Article
METHODS AND APPARATUS FOR DEPOSITING YTTRIUM-CONTAINING FILMS
KALUTARAGE LAKMAL C, SCHMIEGE BENJAMIN, SALY MARK, KNISLEY THOMAS, THOMPSON DAVID
Year of Publication 08.02.2024
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Year of Publication 08.02.2024
Patent
전도성 표면들 상에 블로킹 층들을 증착하기 위한 방법들
DANGERFIELD AARON, HAVERTY MICHAEL, KALUTARAGE LAKMAL C, SALY MARK, BHUYAN BHASKAR JYOTI, LIU FENG Q
Year of Publication 09.01.2024
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Year of Publication 09.01.2024
Patent
로우-k 유전체 막들
DURAND WILLIAM J, MUKHERJEE SHAUNAK, KALUTARAGE LAKMAL C, SALY MARK, YIM KANG SUB
Year of Publication 06.04.2022
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Year of Publication 06.04.2022
Patent
금속 카바이드 막들을 증착시키는 방법들
KALUTARAGE LAKMAL C, ANTHIS JEFFREY W, SALY MARK, CHEN SHIH CHUNG, LIN YONGJING, THOMPSON DAVID
Year of Publication 05.04.2021
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Year of Publication 05.04.2021
Patent
금속 산화물들의 저온 ALD를 위한 방법들
KALUTARAGE LAKMAL C, SALY MARK, TRINH CONG, BALSEANU MIHAELA, BHUYAN BHASKAR JYOTI
Year of Publication 16.11.2020
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Year of Publication 16.11.2020
Patent
산화규소 상의 유전체의 선택적 증착을 위한 방법들
KALUTARAGE LAKMAL C, SALY MARK, HOWLADER RANA, THOMPSON DAVID, BHUYAN BHASKAR JYOTI
Year of Publication 27.04.2020
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Year of Publication 27.04.2020
Patent
이트륨-함유 막들을 증착하기 위한 방법들 및 장치
KALUTARAGE LAKMAL C, SCHMIEGE BENJAMIN, SALY MARK, KNISLEY THOMAS, THOMPSON DAVID
Year of Publication 24.02.2020
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Year of Publication 24.02.2020
Patent
Manganese Precursor Selection and the Thermal Atomic Layer Deposition of Copper/Manganese Alloy Films
Kalutarage, Lakmal C., Clendenning, Scott B., Winter, Charles H.
Published in ECS transactions (13.08.2014)
Published in ECS transactions (13.08.2014)
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Journal Article
Reducing agents for atomic layer deposition
Bhuyan, Bhaskar Jyoti, Saly, Mark, Knisley, Thomas, Kalutarage, Lakmal C
Year of Publication 09.07.2024
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Year of Publication 09.07.2024
Patent
Methods for depositing blocking layers on metal surfaces
Bhuyan, Bhaskar Jyoti, Knisley, Thomas Joseph, Saly, Mark, Kalutarage, Lakmal C
Year of Publication 29.10.2024
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Year of Publication 29.10.2024
Patent