ATOMIC LAYER DEPOSITION OF SILICON-CARBON-AND-NITROGEN-CONTAINING MATERIALS
Bhuyan, Bhaskar Jyoti, Saly, Mark J, Anthis, Jeffrey W, Kalutarage, Lakmal C
Year of Publication 03.10.2024
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Year of Publication 03.10.2024
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ATOMIC LAYER DEPOSITION OF SILICON-CARBON-AND-NITROGEN-CONTAINING MATERIALS
BHUYAN, Bhaskar Jyoti, SALY, Mark J, KALUTARAGE, Lakmal C, ANTHIS, Jeffrey W
Year of Publication 03.10.2024
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Year of Publication 03.10.2024
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EXTREME ULTRAVIOLET PELLICLES AND METHOD OF MANUFACTURING
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Year of Publication 25.07.2024
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Year of Publication 25.07.2024
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EXTREME ULTRAVIOLET PELLICLES AND METHOD OF MANUFACTURING
LIU, Feng Q, KAZEM, Nasrin, SALY, Mark, KALUTARAGE, Lakmal C, ANTHIS, Jeffrey W, KNISLEY, Thomas Joseph
Year of Publication 25.07.2024
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Year of Publication 25.07.2024
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REDUCING AGENTS FOR ATOMIC LAYER DEPOSITION
BHUYAN, Bhaskar Jyoti, KNISLEY, Thomas, SALY, Mark, KALUTARAGE, Lakmal C
Year of Publication 25.08.2022
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Year of Publication 25.08.2022
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Reducing Agents for Atomic Layer Deposition
Bhuyan, Bhaskar Jyoti, Saly, Mark, Knisley, Thomas, Kalutarage, Lakmal C
Year of Publication 18.08.2022
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Year of Publication 18.08.2022
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Methods for depositing blocking layers on metal surfaces
Bhuyan, Bhaskar Jyoti, Saly, Mark, Knisley, Thomas, Kalutarage, Lakmal C
Year of Publication 16.08.2022
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Year of Publication 16.08.2022
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Methods For Depositing Blocking Layers On Metal Surfaces
Bhuyan, Bhaskar Jyoti, Knisley, Thomas Joseph, Saly, Mark, Kalutarage, Lakmal C
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
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Deposition of flowable silicon-containing films
Manna, Pramit, Thompson, David, Mallick, Abhijit Basu, Saly, Mark, Ashok, Tejasvi, Kalutarage, Lakmal C
Year of Publication 29.11.2022
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Year of Publication 29.11.2022
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METHODS FOR DEPOSITING BLOCKING LAYERS ON CONDUCTIVE SURFACES
BHUYAN, Bhaskar Jyoti, LIU, Feng Q, SALY, Mark, HAVERTY, Michael, KALUTARAGE, Lakmal C, DANGERFIELD, Aaron
Year of Publication 10.11.2022
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Year of Publication 10.11.2022
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METHODS FOR DEPOSITING BLOCKING LAYERS ON CONDUCTIVE SURFACES
Bhuyan, Bhaskar Jyoti, Saly, Mark, Kaliappan, Muthukumar, Haverty, Michael, Kalutarage, Lakmal C, Dangerfield, Aaron, Liu, Feng Q
Year of Publication 21.09.2023
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Year of Publication 21.09.2023
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Methods for depositing blocking layers on conductive surfaces
Bhuyan, Bhaskar Jyoti, Saly, Mark, Kaliappan, Muthukumar, Haverty, Michael, Kalutarage, Lakmal C, Dangerfield, Aaron, Liu, Feng Q
Year of Publication 18.07.2023
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Year of Publication 18.07.2023
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Low-k dielectric films
Yim, Kang Sub, Saly, Mark, Durand, William J, Kalutarage, Lakmal C, Mukherjee, Shaunak
Year of Publication 19.07.2022
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Year of Publication 19.07.2022
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