Advanced multilayer metallization schemes with copper as interconnection metal
Murarka, S.P., Gutmann, R.J., Kaloyeros, A.E., Lanford, W.A.
Published in Thin solid films (15.12.1993)
Published in Thin solid films (15.12.1993)
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Journal Article
Conference Proceeding
Tantalum nitride films grown by inorganic low temperature thermal chemical vapor deposition : Diffusion barrier properties in copper metallization
KALOYEROS, A. E, XIAOMENG CHEN, STARK, T, KUMAR, K, SEO, S.-C, PETERSON, G. G, FRISCH, H. L, ARKLES, B, SULLIVAN, J
Published in Journal of the Electrochemical Society (1999)
Published in Journal of the Electrochemical Society (1999)
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Journal Article
The effects of processing parameters in the chemical vapor deposition of cobalt from cobalt tricarbonyl nitrosyl
IVANOVA, A. R, NUESCA, G, XIAOMENG CHEN, GOLDBERG, C, KALOYEROS, A. E, ARKLES, B, SULLIVAN, J. J
Published in Journal of the Electrochemical Society (01.06.1999)
Published in Journal of the Electrochemical Society (01.06.1999)
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Journal Article
Spectroellipsometric characterization of Au-Y2O3–stabilized ZrO2 nanocomposite films
Sirinakis, George, Siddique, Rezina, Dunn, Kathleen A., Efstathiadis, Harry, Carpenter, Michael A., Kaloyeros, Alain E., Sun, Lianchao
Published in Journal of materials research (01.12.2005)
Published in Journal of materials research (01.12.2005)
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Journal Article
Synthesis and characterization of volatile bismuth .beta.-diketonate compounds for metal-organic chemical vapor deposition of thin films
Brooks, K. C, Turnipseed, S. B, Barkley, R. M, Sievers, R. E, Tulchinsky, V, Kaloyeros, A. E
Published in Chemistry of materials (01.07.1992)
Published in Chemistry of materials (01.07.1992)
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Journal Article
On the effect of processing parameters in the chemical-vapor deposition of YBa2Cu3O7-δ thin films on polycrystalline silver
CHEN, L, PIAZZA, T. W, WILKINS, D. J, KNORR, D. B, SCHMIDT, B. E, KELSEY, J. E, KALOYEROS, A. E, HAZELTON, D. W, WALKER, M. S, LUO, L, DYE, R. C, MAGGIORE, C. J
Published in Journal of applied physics (01.06.1993)
Published in Journal of applied physics (01.06.1993)
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Journal Article
Photoluminescence at 1540 nm from erbium-doped amorphous silicon carbide films
Gallis, Spyros, Efstathiadis, Harry, Huang, Mengbing, Nyein, Ei Ei, Hommerich, Uwe, Kaloyeros, Alain E.
Published in Journal of materials research (01.08.2004)
Published in Journal of materials research (01.08.2004)
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Journal Article
Interlayer mediated epitaxy of cobalt silicide on silicon (100) from low temperature chemical vapor deposition of cobalt formation mechanisms and associated properties
LONDERGAN, Ana R, NUESCA, Guillermo, GOLDBERG, Cindy, PETERSON, Gregory, KALOYEROS, Alain E, ARKLES, Barry, SULLIVAN, John J
Published in Journal of the Electrochemical Society (2001)
Published in Journal of the Electrochemical Society (2001)
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Journal Article
Chemical Vapor Deposition of ZnS:Mn for Thin-Film Electroluminescent Display Applications
Topol, Anna W., Dunn, Kathleen A., Barth, Karl W., Nuesca, Guillermo M., Taylor, Brian K., Dovidenko, Katharine, Kaloyeros, Alain E., Tuenge, Richard T., King, Chris N.
Published in Journal of materials research (01.03.2004)
Published in Journal of materials research (01.03.2004)
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Journal Article
Low-temperature metalorganic chemical vapor deposition of Al2O3 for advanced complementary metal-oxide semiconductor gate dielectric applications
Skordas, Spyridon, Papadatos, Filippos, Nuesca, Guillermo, Sullivan, John J., Eisenbraun, Eric T., Kaloyeros, Alain E.
Published in Journal of materials research (01.08.2003)
Published in Journal of materials research (01.08.2003)
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Journal Article
Barrier properties of titanium nitride films grown by low temperature chemical vapor deposition from titanium tetraiodide
FALTERMEIER, C, GOLDBERG, C, JONES, M, UPHAM, A, MANGER, D, PETERSON, G, LAU, J, KALOYEROS, A. E, ARKLES, B, PARANJPE, A
Published in Journal of the Electrochemical Society (01.03.1997)
Published in Journal of the Electrochemical Society (01.03.1997)
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Journal Article
Microstructural and electrical characterization of gas cluster ion beam-smoothed YBCO films
Hatzistergos, M.S., Efstathiadis, H., Lifshin, E., Kaloyeros, A.E., Reeves, J.L., Selvamanickam, V., Allen, L.P., MacCrimmon, R.
Published in IEEE transactions on applied superconductivity (01.06.2003)
Published in IEEE transactions on applied superconductivity (01.06.2003)
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Journal Article
Conference Proceeding
Thermal stability of on-chip copper interconnect structures
Gutmann, Ronald J., Chow, T.Paul, Kaloyeros, Alain E., Lanford, William A., Muraka, Shyam P.
Published in Thin solid films (15.06.1995)
Published in Thin solid films (15.06.1995)
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Journal Article
In situ mass spectral and IR studies of the role of auxiliary reagents in the enhancement of copper growth in the chemical vapor deposition of Cu(II) β-diketonate precursors
Kaloyeros, Alain E., Zheng, Bo, Lou, Ishing, Lau, Janice, Hellgeth, John W.
Published in Thin solid films (15.06.1995)
Published in Thin solid films (15.06.1995)
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