THIN-FILM ABSOLUTE PRESSURE SENSORS AND METHODS OF MANUFACTURING THE SAME
KALLFASS, TRAUGOTT, SCHNEIDER, GEORG, HABIBI, MASOUD, HEGNER, FRANK, LUEDER, ERNST
Year of Publication 30.11.1999
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Year of Publication 30.11.1999
Patent
Capacitive pressure sensors with high linearity by optimizing electrode boundaries
BENZEL; HUBERT, KALLFASS; TRAUGOTT, LUEDER; ERNST, SCHAEPPERLE; JOERG
Year of Publication 11.08.1998
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Year of Publication 11.08.1998
Patent
Methods of manufacturing thin-film absolute pressure sensors
KALLFASS; TRAUGOTT, HEGNER; FRANK, HABIBI; MASOUD, SCHNEIDER; GEORG, LUEDER; ERNST
Year of Publication 05.12.1995
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Year of Publication 05.12.1995
Patent