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CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
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CORROSION RESISTANT GROUND SHIELD OF PROCESSING CHAMBER
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Year of Publication 25.07.2023
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Year of Publication 24.08.2021
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Reactions of [(Me 3Si) 3CAlMe 2] with substituted benzoic acids. Isolation of a rare organoalumoxane carboxylate
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Published in Journal of organometallic chemistry (01.10.2011)
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Year of Publication 12.07.2021
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Year of Publication 12.07.2021
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알루미늄 반도체 프로세스 장비를 위한 배리어 층으로서의 알루미늄 전기도금 및 산화물 형성
LUBOMIRSKY DMITRY, GORADIA PRERNA A, PAREEK YOGITA, THAKUR BIPIN, KALITA LAKSHESWAR, LIN YIXING, KADAM ANKUR, BAJAJ GEETIKA, PAPKE KEVIN A
Year of Publication 24.10.2018
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Year of Publication 24.10.2018
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반도체 프로세싱 장비 상에 이트리아 또는 이트륨 산화물을 전기화학적으로 성장시키기 위한 방법
LUBOMIRSKY DMITRY, GORADIA PRERNA A, PAREEK YOGITA, THAKUR BIPIN, KALITA LAKSHESWAR, LIN YIXING, KADAM ANKUR, BAJAJ GEETIKA, PAPKE KEVIN A, VAIDYA KAUSHIK
Year of Publication 24.10.2018
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Year of Publication 24.10.2018
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