Effect of Ion Doping Conditions on Electrical Conductivity of Amorphous Silicon Films and Its Application to Thin Film Transistors
Kakkad, Ramesh, Takuya Shimano, Takuya Shimano, Nobuki Ibaraki, Nobuki Ibaraki
Published in Japanese Journal of Applied Physics (01.12.1992)
Published in Japanese Journal of Applied Physics (01.12.1992)
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Journal Article
Stability Enhancement of Polysilicon Thin-Film Transistors Using Stacked Plasma-Enhanced Chemical Vapor Deposited SiO 2 /SiN x Gate Dielectric
Choi, Byoung-Deog, Kim, Won-Sik, So, Myeong-Seob, Koo, Jae-Bon, Kakkad, Ramesh, Mo, Yeon-Gon, Kim, Sung-Chul
Published in Japanese Journal of Applied Physics (01.09.2005)
Published in Japanese Journal of Applied Physics (01.09.2005)
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Journal Article