SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
YAMAZAKI TAKESHI, YAHIRO SHUNICHI, KAJIWARA HIRONOBU, HIRAKAWA HIDEKI
Year of Publication 01.06.2023
Get full text
Year of Publication 01.06.2023
Patent
METHOD FOR SUPPRESSING FRAME GENERATION AND APPARATUS FOR SUPPRESSING FRAME GENERATION
IKEDA KATSUHIRO, OGATA TSUNEMOTO, SAKAI MITSUHIRO, KAJIWARA HIRONOBU, HIMENO KAZUOMI
Year of Publication 11.04.2014
Get full text
Year of Publication 11.04.2014
Patent
Substrate processing apparatus and substrate processing method wherein the substrate processing apparatus includes a pretreatment line, a coating line, a conveying line, a development processing line, a first conveying part, a second conveying part, a third conveying part, and a fourth conveying part
Get full text
Patent