Solidly mounted BAW resonators with layer-transferred AlN using sacrificial Si surfaces
Abd Allah, Mohamed, Thalhammer, Robert, Kaitila, Jyrki, Herzog, Thomas, Weber, Werner, Schmitt-Landsiedel, Doris
Published in Solid-state electronics (01.09.2010)
Published in Solid-state electronics (01.09.2010)
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Journal Article
Conference Proceeding
BULK ACOUSTIC WAVE RESONATOR COMPRISING BRIDGE FORMED WITHIN PIEZOELECTRIC LAYER
KAITILA JYRKI, LARSON JOHN D. III, NIKKEL PHIL, SHIRAKAWA ALEXANDRE, BURAK DARIUSZ
Year of Publication 21.02.2013
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Year of Publication 21.02.2013
Patent
Thin film bulk acoustic wave filter
Ylilammi, M., Ella, J., Partanen, M., Kaitila, J.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2002)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.04.2002)
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Journal Article
COLLIMATOR FOR PRODUCTION OF PIEZOELECTRIC LAYERS WITH TILTED C-AXIS ORIENTATION
KÜSTERS, Yves, KAITILA, Jyrki, FREYTAG, Rudolf, BUCHHOLZ, Stephan, SCHREITER, Matthias, BODAMMER, Georg, KIENER, Christoph
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
Patent
Collimator for Production of Piezoelectric Layers with Tilted c-Axis Orientation
KÜSTERS, Yves, FREYTAG, Rudolf, BUCHHOLZ, Stephan, SCHREITER, Matthias, BODAMMER, Georg, KIENER, Christoph, Kaitila, Jyrki
Year of Publication 22.10.2023
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Year of Publication 22.10.2023
Patent
Estimating materials parameters in thin-film BAW resonators using measured dispersion curves
Makkonen, T., Pensala, T., Vartiainen, J., Knuuttila, J.V., Kaitila, J., Salomaa, M.M.
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.2004)
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01.01.2004)
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Journal Article
Bulkakustikresonator, der eine nicht-piezoelektrische Schicht aufweist
Nikkel, Phil, Handtmann, Martin, Shirakawa, Alexandre, Burak, Dariusz, Kaitila, Jyrki
Year of Publication 07.12.2023
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Year of Publication 07.12.2023
Patent
Complex peripheral Lamb modes in FBARs
Kaitila, Jyrki, Larson, John D.
Published in 2013 IEEE International Ultrasonics Symposium (IUS) (01.07.2013)
Published in 2013 IEEE International Ultrasonics Symposium (IUS) (01.07.2013)
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Conference Proceeding