Design of micromachines under uncertainty with the sample-average approximation method
GUARACAO, Jorge Mario MONSALVE, LANGA, Sergiu, STOLZ, Michael, MROSK, Andreas, KAISER, Bert, SCHENK, Harald
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2024)
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2024)
Get full text
Journal Article
Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion
Monsalve, Jorge M., Melnikov, Anton, Stolz, Michael, Mrosk, Andreas, Jongmanns, Marcel, Wall, Franziska, Langa, Sergiu, Marica-Bercu, Ioana, Brändel, Tim, Kircher, Marco, Schenk, Hermann A.G., Kaiser, Bert, Schenk, Harald
Published in Sensors and actuators. A. Physical. (01.10.2022)
Published in Sensors and actuators. A. Physical. (01.10.2022)
Get full text
Journal Article
The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve, Jorge M., Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald
Published in Microsystems & nanoengineering (30.11.2022)
Published in Microsystems & nanoengineering (30.11.2022)
Get full text
Journal Article
Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation
Melnikov, Anton, Schenk, Hermann A. G., Monsalve, Jorge M., Wall, Franziska, Stolz, Michael, Mrosk, Andreas, Langa, Sergiu, Kaiser, Bert
Published in Microsystems & nanoengineering (28.05.2021)
Published in Microsystems & nanoengineering (28.05.2021)
Get full text
Journal Article
Selective laser treatment and laser patterning of metallic and semiconducting nanotubes in single walled carbon nanotube films
Roch, Aljoscha, Roch, Teja, Talens, Esther R., Kaiser, Bert, Lasagni, Andrés, Beyer, Eckhard, Jost, Oliver, Cuniberti, Gianaurelio, Leson, Andreas
Published in Diamond and related materials (01.05.2014)
Published in Diamond and related materials (01.05.2014)
Get full text
Journal Article
A small-gap electrostatic micro-actuator for large deflections
Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam
Published in Nature communications (11.12.2015)
Published in Nature communications (11.12.2015)
Get full text
Journal Article
Design and characterization of a silicon MEMS microvalve for proportional flow control based on electrostatic bending actuators
Jongmanns, Marcel, Kaiser, Bert, Ruffert, Christine, Langa, Sergiu
Published in Microsystem technologies : sensors, actuators, systems integration (09.05.2024)
Published in Microsystem technologies : sensors, actuators, systems integration (09.05.2024)
Get full text
Journal Article
Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers
Monsalve, Jorge M., Melnikov, Anton, Kaiser, Bert, Schuffenhauer, David, Stolz, Michael, Ehrig, Lutz, Schenk, Hermann A. G., Conrad, Holger, Schenk, Harald
Published in IEEE/ASME transactions on mechatronics (01.10.2022)
Published in IEEE/ASME transactions on mechatronics (01.10.2022)
Get full text
Journal Article
Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald
Published in Micromachines (Basel) (18.04.2018)
Published in Micromachines (Basel) (18.04.2018)
Get full text
Journal Article
Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David
Published in Microsystems & nanoengineering (07.10.2019)
Published in Microsystems & nanoengineering (07.10.2019)
Get full text
Journal Article
체적 흐름과의 고효율적 상호작용을 위한 MEMS
MELNIKOV ANTON, WALL FRANZISKA, LANGA SERGIU, MONSALVE GUARACAO JORGE MARIO, KAISER BERT
Year of Publication 13.02.2023
Get full text
Year of Publication 13.02.2023
Patent
About stress in filled DRIE-trenches
Kaiser, Bert, Drabe, Christian, Graßhoff, Thomas, Conrad, Holger, Schenk, Harald
Published in Journal of micromechanics and microengineering (01.08.2015)
Published in Journal of micromechanics and microengineering (01.08.2015)
Get full text
Journal Article