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SUBSTRATE PROCESSING METHOD, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, PROGRAM, AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, PROGRAM, AND SUBSTRATE PROCESSING APPARATUS

by KAGA, Yukinao, KURIBAYASHI, Koei
Year of Publication 03.10.2024

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Patent

SUBSTRATE PROCESSING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR APPARATUS, PROGRAM, AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR APPARATUS, PROGRAM, AND SUBSTRATE PROCESSING APPARATUS

by OGAWA, Arito, KAGA, Yukinao
Year of Publication 27.06.2024

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Patent

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

by KAGA YUKINAO
Year of Publication 21.02.2019

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Patent

METHOD FOR TREATING SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, PROGRAM, AND SUBSTRATE TREATMENT APPARATUS

METHOD FOR TREATING SUBSTRATE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, PROGRAM, AND SUBSTRATE TREATMENT APPARATUS

by KAGA YUKINAO, KURIBAYASHI YUKINAGA, NOMURA KENTO
Year of Publication 07.05.2024

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Patent

METHOD OF PROCESSING SUBSTRATE METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE PROGRAM AND SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE PROGRAM AND SUBSTRATE PROCESSING APPARATUS

by KAGA YUKINAO, KURIBAYASHI KOEI, NOMURA KENTO
Year of Publication 30.04.2024

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Patent

반도체 장치의 제조 방법, 기판 처리 장치 및 기록매체

반도체 장치의 제조 방법, 기판 처리 장치 및 기록매체

by KAGA YUKINAO, YOSHIDA RYOSUKE
Year of Publication 13.10.2020

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Patent

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SUBSTRATE LOADING METHOD, RECORD MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, SUBSTRATE LOADING METHOD, RECORD MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

by KAGA YUKINAO, YOSHIDA RYOSUKE
Year of Publication 31.10.2019

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Patent

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING DEVICE, AND RECORDING MEDIUM

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING DEVICE, AND RECORDING MEDIUM

by KAGA YUKINAO
Year of Publication 23.06.2016

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Patent

SUBSTRATE TREATMENT DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

SUBSTRATE TREATMENT DEVICE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

by KAGA YUKINAO, YOSHIDA RYOSUKE
Year of Publication 17.10.2019

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Patent

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING DEVICE, AND PROGRAM

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING DEVICE, AND PROGRAM

by YOSHIDA, Ryosuke, KAGA, Yukinao
Year of Publication 03.10.2019

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Patent

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE METHOD OF LOADING SUBSTRATE NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE METHOD OF LOADING SUBSTRATE NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS

by KAGA YUKINAO, YOSHIDA RYOSUKE
Year of Publication 19.08.2019

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Patent

SUBSTRATE PROCESSING APPARATUS METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

by KAGA YUKINAO, YOSHIDA RYOSUKE
Year of Publication 19.08.2019

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Patent

FILM THICKNESS MEASURING APPARATUS, FILM THICKNESS MEASURING METHOD, PROGRAM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

FILM THICKNESS MEASURING APPARATUS, FILM THICKNESS MEASURING METHOD, PROGRAM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

by KAGA YUKINAO, YOSHIDA RYOSUKE
Year of Publication 18.04.2019

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Patent

반도체 장치의 제조 방법, 기판 장전 방법 및 기록 매체

반도체 장치의 제조 방법, 기판 장전 방법 및 기록 매체

by KAGA YUKINAO, YOSHIDA RYOSUKE
Year of Publication 11.09.2018

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Patent

반도체 장치의 제조 방법, 프로그램, 기판 처리 장치 및 기판 처리 방법

반도체 장치의 제조 방법, 프로그램, 기판 처리 장치 및 기판 처리 방법

by KAGA YUKINAO, NAGATOMI YOSHIMASA, JODA TAKUYA
Year of Publication 13.10.2021

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Patent

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR LOADING SUBSTRATE, AND RECORDING MEDIUM

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR LOADING SUBSTRATE, AND RECORDING MEDIUM

by YOSHIDA, Ryosuke, KAGA, Yukinao
Year of Publication 05.10.2017

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Patent

Thermal Stability of RuO 2 Thin Films and Effects of Annealing Ambient on Their Reduction Process

Thermal Stability of RuO 2 Thin Films and Effects of Annealing Ambient on Their Reduction Process

by Yukinao Kaga, Yukinao Kaga, Yoshio Abe, Yoshio Abe, Midori Kawamura, Midori Kawamura, Katsutaka Sasaki, Katsutaka Sasaki
Published in Japanese Journal of Applied Physics (01.06.1999)

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Journal Article

METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, PROGRAM, AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, PROGRAM, AND SUBSTRATE PROCESSING APPARATUS

by JODA, Takuya, KAGA, Yukinao, NAGATOMI Yoshimasa
Year of Publication 10.09.2020

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Patent

Formation Process and Electrical Property of RuO 2 Thin Films Prepared by Reactive Sputtering

Formation Process and Electrical Property of RuO 2 Thin Films Prepared by Reactive Sputtering

by Yukinao Kaga, Yukinao Kaga, Yoshio Abe, Yoshio Abe, Hideto Yanagisawa, Hideto Yanagisawa, Katsutaka Sasaki, Katsutaka Sasaki
Published in Japanese Journal of Applied Physics (01.06.1998)

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Journal Article

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING DEVICE, AND RECORDING MEDIUM

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING DEVICE, AND RECORDING MEDIUM

by KAGA YUKINAO, OGAWA ARITO
Year of Publication 19.04.2016

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Patent

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