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Year of Publication 27.05.2021
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Verfahren zum Bestimmen, insbesondere zum Korrigieren, eines Strahlpositionierfehlers
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Year of Publication 16.05.2024
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Picosecond electric-field-induced threshold switching in phase-change materials
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Published in arXiv.org (08.07.2016)
Published in arXiv.org (08.07.2016)
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METHOD FOR PRODUCING A REFLECTING OPTICAL ELEMENT OF A PROJECTION EXPOSURE APPARATUS AND REFLECTING OPTICAL ELEMENT FOR A PROJECTION EXPOSURE APPARATUS, PROJECTION LENS AND PROJECTION EXPOSURE APPARATUS
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Year of Publication 21.11.2020
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Year of Publication 21.11.2020
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Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatus
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Year of Publication 01.04.2020
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Year of Publication 01.04.2020
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