Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates
Su, Jingxiang, Fichtner, Simon, Ghori, Muhammad Zubair, Wolff, Niklas, Islam, Md Redwanul, Lotnyk, Andriy, Kaden, Dirk, Niekiel, Florian, Kienle, Lorenz, Wagner, Bernhard, Lofink, Fabian
Published in Micromachines (Basel) (17.05.2022)
Published in Micromachines (Basel) (17.05.2022)
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Journal Article
Highly Miniaturized in-ear MEMS Loudspeaker Featuring High SPL
Stoppel, Fabian, Fankhanel, Johannes, Giese, Thorsten, Eisermann, Christian, Pieper, Isa, Kaden, Dirk, Castellanos, Lenny, Grunzig, Sven
Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
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Published in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (25.06.2023)
Conference Proceeding
A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al1-X ScxN
Fichtner, Simon, Kaden, Dirk, Lofink, Fabian, Wagner, Bernhard
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding
In-situ large scale deposition of PZT films by RF magnetron sputtering
Kratzer, M., Castaldi, L., Heinz, B., Mamazza, R., Kaden, D., Quenzer, H., Wagner, B.
Published in 2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (01.07.2011)
Published in 2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (01.07.2011)
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Conference Proceeding
Influence of platinum bottom electrode on the piezoelectric performance of hot RF sputtered PZT films
Kaden, D., Quenzer, H., Wagner, B., Kratzer, M., Castaldi, L., Heinz, B., Mamazza, R.
Published in 2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (01.07.2011)
Published in 2011 International Symposium on Applications of Ferroelectrics (ISAF/PFM) and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (01.07.2011)
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Conference Proceeding