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Irradiation system with ion beam and automatic tuning system

by SOGABE, HIROSHI, TSUKIHARA, MITSUKUNI, KABASAWAI, MITSUAKI
Year of Publication 21.10.2012

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Irradiation system with ion beam/ charged particle beam

by NISHI, TAKASHI, YAGITA, TAKANORI, TSUKIHARA, MITSUKUNI, ISHIKAWA, MASAKI, KUDO, TETSUYA, MURAKAMI, JUNICHI, SUGITANI, MICHIRO, KABASAWAI, MITSUAKI
Year of Publication 01.03.2013

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Wafer charge compensation device and ion implantation system having the same

by KAWAGUCHI, HIROSHI, SOGABE, HIROSHI, UEDA, KAZUNARI, SANO, MAKOTO, TSUKIHARA, MITSUKUNI, MURAKAMI, JUNICHI, SUGITANI, MICHIRO, KABASAWAI, MITSUAKI, KURODA, TAKASHI
Year of Publication 21.07.2012

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Irradiation system with ion beam/charged particle beam

by NISHI, TAKASHI, YAGITA, TAKANORI, TSUKIHARA, MITSUKUNI, ISHIKAWA, MASAKI, KUDO, TETSUYA, MURAKAMI, JUNICHI, SUGITANI, MICHIRO, KABASAWAI, MITSUAKI
Year of Publication 16.06.2006

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Wafer charge compensation device and ion implantation system having the same

by KAWAGUCHI, HIROSHI, SOGABE, HIROSHI, UEDA, KAZUNARI, SANO, MAKOTO, TSUKIHARA, MITSUKUNI, MURAKAMI, JUNICHI, SUGITANI, MICHIRO, KABASAWAI, MITSUAKI, KURODA, TAKASHI
Year of Publication 01.06.2006

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Patent

Irradiation system with ion beam and automatic tuning system

Irradiation system with ion beam/ charged particle beam

Wafer charge compensation device and ion implantation system having the same

Irradiation system with ion beam/charged particle beam

Wafer charge compensation device and ion implantation system having the same

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