Structure and properties of crystalline titanium oxide layers deposited by reactive pulse magnetron sputtering
Zywitzki, O., Modes, T., Sahm, H., Frach, P., Goedicke, K., Glöß, D.
Published in Surface & coatings technology (01.03.2004)
Published in Surface & coatings technology (01.03.2004)
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Journal Article
Pulse magnetron sputtering in a reactive gas mixture of variable composition to manufacture multilayer and gradient optical coatings
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Journal Article
Conference Proceeding
High rate deposition of insulating TiO2 and conducting ITO films for optical and display applications
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Conference Proceeding
Journal Article
Pulsed magnetron sputter technology
Schiller, S., Goedicke, K., Reschke, J., Kirchhoff, V., Schneider, S., Milde, F.
Published in Surface & coatings technology (03.12.1993)
Published in Surface & coatings technology (03.12.1993)
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Journal Article
Conference Proceeding
The deposition of hard crystalline Al2O3 layers by means of bipolar pulsed magnetron sputtering
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Conference Proceeding
Journal Article
A versatile coating tool for reactive in-line sputtering in different pulse modes
Frach, P, Goedicke, K, Gottfried, C, Bartzsch, H
Published in Surface & coatings technology (01.07.2001)
Published in Surface & coatings technology (01.07.2001)
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Journal Article
Different pulse techniques for stationary reactive sputtering with double ring magnetron
Bartzsch, H., Frach, P., Goedicke, K., Gottfried, Chr
Published in Surface & coatings technology (01.11.1999)
Published in Surface & coatings technology (01.11.1999)
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Journal Article
In situ-force measurement for the determination of the evaporation rate with high-rate electron beam evaporation
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Journal Article
Conference Proceeding
Plasma-activated electron beam deposition with diffuse cathodic vacuum arc discharge (SAD): a technique for coating strip steel
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Journal Article
Conference Proceeding
Plasma-activated high rate electron beam evaporation using a spotless cathodic arc
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Journal Article
Conference Proceeding
Rod cathode arc-activated deposition (RAD) — a new plasma-activated electron beam PVD process
Scheffel, B., Metzner, Chr, Goedicke, K., Heinss, J.-P., Zywitzki, O.
Published in Surface & coatings technology (01.11.1999)
Published in Surface & coatings technology (01.11.1999)
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Journal Article
Electron beam-PVD for enhanced surface properties on metallic strips and sheets
Metzner, Chr, Goedicke, K., Hoetzsch, G., Scheffel, B., Heinss, J.-P.
Published in Surface & coatings technology (01.10.1997)
Published in Surface & coatings technology (01.10.1997)
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Application of the magnetron activated deposition process (MAD-process) to coat polymer films with alumina in web coaters
Schiller, N., Reschke, J., Goedicke, K., Neumann, M.
Published in Surface & coatings technology (15.12.1996)
Published in Surface & coatings technology (15.12.1996)
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Conference Proceeding