Charge cross talk in sub-lithographically shrinked 32 nm Twin Flash™ memory cells
Beug, M.F., Knöfler, R., Ludwig, C., Hagenbeck, R., Müller, T., Riedel, S., Höhr, T., Sachse, J.-U., Nagel, N., Mikolajick, T., Küsters, K.-H.
Published in Solid-state electronics (01.04.2008)
Published in Solid-state electronics (01.04.2008)
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Latest R&D results of Q.antum technology and consideration of symmetrical passivation schemes
Bordihn, S., Engelhart, P., Klenke, C., Suva, K., Kaden, T., Dahne, S., Stenzel, F., Zimmermann, G., Wendt, J., Mette, A., Trager, M., Schmidt, S., Fischer, M., Muller, J. W., Kusters, K. H.
Published in 2012 38th IEEE Photovoltaic Specialists Conference (01.06.2012)
Published in 2012 38th IEEE Photovoltaic Specialists Conference (01.06.2012)
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Lithography for patterning trench contacts
Gutmann, A., Czech, G., Stelz, F.X., Küsters, K.-H.
Published in Microelectronic engineering (01.03.1992)
Published in Microelectronic engineering (01.03.1992)
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A stacked capacitor cell with a fully self-aligned contact process for high-density dynamic random access memories
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Journal Article
Highly scalable 90nm STI bounded twin flash cell with local interconnect
Nagel, N., Olligs, D., Polei, V., Parascandola, S., Boubekeur, H., Bach, L., Muller, T., Strassburg, M., Riedel, S., Kratzert, P., Caspary, D., Deppe, J., Wilier, J., Schulze, N., Mikolajick, T., Kusters, K.-H., Shappir, A., Redmard, E., Bloom, I., Eitan, B.
Published in Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005 (2005)
Published in Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005 (2005)
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Conference Proceeding
Influence of Base Resistivity on Solar Cell Parameters of Double-Side Contacted Rear Junction Solar Cells
Mertens, V., Ballmann, T., Lee, J.Y., Junghänel, M., Stenzel, F., Brandt, L., Schulze, A., Engelhart, P., Müller, J.W., Wawer, P., Küsters, K.H.
Published in Energy procedia (2012)
Published in Energy procedia (2012)
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Journal Article
An overview of twin-flash technology
Stein, E.G., Kusters, K.-H., Kamienski, V., Isler, M., Mikolajick, T., Ludwig, C., Schulze, N., Nagel, N., Riedel, S., Willer, J.
Published in Symposium Non-Volatile Memory Technology 2005 (2005)
Published in Symposium Non-Volatile Memory Technology 2005 (2005)
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Conference Proceeding
The Future of Charge Trapping Memories
Mikolajick, T., Specht, M., Nagel, N., Mueller, T., Riedel, S., Beug, F., Melde, T., Kusters, K.-H.
Published in 2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) (01.04.2007)
Published in 2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) (01.04.2007)
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Conference Proceeding
A New Twin Flash™ Cell for 2 and 4 Bit Operation at 63nm Feature Size
Nagel, N., Boubekeur, H., Heinrichsdorff, F., Bach, L., Polei, V., Gupta, J., Pritchard, D., Riedel, S., Strassburg, M., Deppe, J., Bewersdorff-Sarlette, U., Muller, T., Verhoeven, M., Lattard, L., Markert, M., Ruttkowski, E., Mikalo, R., Willer, J., Schulze, N., Ludwig, C., v. Kamienski, E.G. Stein, Mikolajick, T., Isler, M., Kusters, K.-H., Shappir, A., Shur, Y., Lusky, E., Eitan, B., Pissors, V., Sachse, J.-U., Manger, D., Caspary, D., Parascandola, S., Olligs, D.
Published in 2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) (01.04.2007)
Published in 2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) (01.04.2007)
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Conference Proceeding
Buried stacked capacitor cells for 16M and 64M DRAMS
Dietl, J, DoThanh, L, Kusters, K H, Kusztelan, L, Mulhoff, H M, Muller, W, Stelz, F X
Published in ESSDERC '90: 20th European Solid State Device Research Conference (01.09.1990)
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Published in ESSDERC '90: 20th European Solid State Device Research Conference (01.09.1990)
Conference Proceeding
Electrical Properties of Ultra Thin Multilayer Dielectrics on Polysilicon
Hirschler, J., Thanh, L. Do, Kusters, K.H., Sichart, K. v.
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
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Conference Proceeding
Stacked Capacitor in Trench Cell for 16M-DRAM
Kusters, K.H., DoThanh, L., Stelz, F.X., Kellner, W.-U., Muhlhoff, H.M., Muller, W.
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
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Conference Proceeding
A Self Aligned Contact Process with Improved Surface Planarization
Kusters, K.H., Sesselmann, W., Melzner, H., Friesel, B.
Published in ESSDERC '88: 18th European Solid State Device Research Conference (01.09.1988)
Published in ESSDERC '88: 18th European Solid State Device Research Conference (01.09.1988)
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Conference Proceeding
Pitch fragmentation induced odd/even effects in a 36 nm floating gate NAND technology
Beug, M.F., Parascandola, S., Hoehr, T., Muller, T., Reichelt, R., Muller-Meskamp, L., Geiser, P., Geppert, T., Bach, L., Bewersdorff-Sarlette, U., Kenny, O., Brandl, S., Marschner, T., Meyer, S., Riedel, S., Specht, M., Manger, D., Knofler, R., Knobloch, K., Kratzert, P., Ludwig, C., Kusters, K.-H.
Published in 2008 9th Annual Non-Volatile Memory Technology Symposium (NVMTS) (01.11.2008)
Published in 2008 9th Annual Non-Volatile Memory Technology Symposium (NVMTS) (01.11.2008)
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Conference Proceeding
Sub Micron P-MOSFETs under Static and SWAP Stress
Muhlhoff, H.-M., Murkin, P., Orlowski, M., Weber, W., Kusters, K. H., Muller, W., Rogers, C. M., Wendt, H.
Published in 1987 Symposium on VLSI Technology. Digest of Technical Papers (01.05.1987)
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Published in 1987 Symposium on VLSI Technology. Digest of Technical Papers (01.05.1987)
Conference Proceeding
A High Density 4Mbit DRAM Process Using a Fully Overlapping Bitline Contact (FOBIC) Trench Cell
Kusters, K. H., Enders, G., Meyberg, W., Benzinger, H., Hasler, B., Higelin, G., Rohl, S., Muhlhoff, H. M., Muller, W.
Published in 1987 Symposium on VLSI Technology. Digest of Technical Papers (01.05.1987)
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Published in 1987 Symposium on VLSI Technology. Digest of Technical Papers (01.05.1987)
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