by KÜHNE, Stéphane, HIEROLD, Christofer
Published in Journal of micromechanics and microengineering (01.08.2011)

by Bachmann, Daniel, Schöberle, Bernd, Kühne, Stéphane, Leiner, Yves, Hierold, Christofer
Published in Sensors and actuators. A. Physical. (14.08.2006)

by Bachmann, Daniel, Kühne, Stéphane, Hierold, Christofer
Published in Sensors and actuators. A. Physical. (08.11.2006)

by Tricoli, Antonio, Graf, Markus, Mayer, Felix, Kuühne, Stéphane, Hierlemann, Andreas, Pratsinis, Sotiris E.
Published in Advanced materials (Weinheim) (18.08.2008)

by Kühne, Stéphane
Year of Publication 14.09.2021

by Bachmann, D., Kuhne, S., Hierold, C.
Published in 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2007)

by KÜHNE, Stéphane
Year of Publication 22.01.2020

by Yunjia Li, Psychogiou, Dimitra, Kuhne, Stephane, Hesselbarth, Jan, Hafner, Christian, Hierold, Christofer
Published in Journal of microelectromechanical systems (01.08.2013)

by Kühne, Stéphane
Year of Publication 28.02.2019

by KÜHNE, Stéphane
Year of Publication 09.01.2019

by KÜHNE, Stéphane
Year of Publication 08.09.2017

by KÜHNE, Stéphane
Year of Publication 30.08.2017

by Psychogiou, Dimitra, Li, Yunjia, Hesselbarth, Jan, Kühne, Stephane, Peroulis, Dimitrios, Hierold, Christofer, Hafner, Christian
Published in Microwave and optical technology letters (01.03.2013)

by GOEHLICH, ANDREAS, KÜHNE, STÉPHANE, CAVALLONI, CLAUDIO
Year of Publication 10.08.2016

by STÉPHANE KÜHNE, CLAUDIO CAVALLONI
Year of Publication 15.04.2015

by Andreas GOEHLICH, Claudio CAVALLONI, Stéphane KÜHNE
Year of Publication 05.11.2018

by Stéphane Kühne, Andreas Goehlich, Claudio Cavalloni
Year of Publication 01.08.2017

by Andreas GOEHLICH, Claudio CAVALLONI, Stéphane KÜHNE
Year of Publication 07.10.2016

by GOEHLICH, ANDREAS, KÜHNE, STÉPHANE, CAVALLONI, CLAUDIO
Year of Publication 09.04.2015

by Bachmann, D., Kuhne, S., Hierold, C.
Published in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (2005)