Fabrication and characterization of folded SU-8 suspensions for MEMS applications
Bachmann, Daniel, Schöberle, Bernd, Kühne, Stéphane, Leiner, Yves, Hierold, Christofer
Published in Sensors and actuators. A. Physical. (14.08.2006)
Published in Sensors and actuators. A. Physical. (14.08.2006)
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Micropatterning Layers by Flame Aerosol Deposition-Annealing
Tricoli, Antonio, Graf, Markus, Mayer, Felix, Kuühne, Stéphane, Hierlemann, Andreas, Pratsinis, Sotiris E.
Published in Advanced materials (Weinheim) (18.08.2008)
Published in Advanced materials (Weinheim) (18.08.2008)
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Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter
Yunjia Li, Psychogiou, Dimitra, Kuhne, Stephane, Hesselbarth, Jan, Hafner, Christian, Hierold, Christofer
Published in Journal of microelectromechanical systems (01.08.2013)
Published in Journal of microelectromechanical systems (01.08.2013)
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