Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition
McClelland, Jabez J, Anderson, William R, Bradley, Curtis C, Walkiewicz, Mirek, Celotta, Robert J, Jurdik, Erich, Deslattes, Richard D
Published in Journal of research of the National Institute of Standards and Technology (01.03.2003)
Published in Journal of research of the National Institute of Standards and Technology (01.03.2003)
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