Direct current magnetic insulation of an immersed RF antenna
Jaworski, M A, Jurczyk, B E, Antonsen, Erik L, Ruzic, D N
Published in Plasma sources science & technology (01.08.2006)
Published in Plasma sources science & technology (01.08.2006)
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Journal Article
Illinois debris-mitigation EUV applications laboratory
Jurczyk, B.E., Vargas-Lopez, E., Neumann, M.N., Ruzic, D.N.
Published in Microelectronic engineering (01.02.2005)
Published in Microelectronic engineering (01.02.2005)
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Journal Article
Reduction of Ion Energies From a Multicomponent Z -Pinch Plasma
Ruzic, D.N., Thompson, K.C., Jurczyk, B.E., Antonsen, E.L., Srivastava, S.N., Spencer, J.B.
Published in IEEE transactions on plasma science (01.06.2007)
Published in IEEE transactions on plasma science (01.06.2007)
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Journal Article
Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography
Thompson, Keith C., Antonsen, Erik L., Hendricks, Matthew R., Jurczyk, Brian E., Williams, M., Ruzic, D.N.
Published in Microelectronic engineering (01.03.2006)
Published in Microelectronic engineering (01.03.2006)
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Journal Article
Computational studies of collisional processes in inertial electrostatic glow discharge fusion devices
Miley, G.H., DeMora, J.M., Jurczyk, B.E., Nieto, M.
Published in 18th IEEE/NPSS Symposium on Fusion Engineering. Symposium Proceedings (Cat. No.99CH37050) (1999)
Published in 18th IEEE/NPSS Symposium on Fusion Engineering. Symposium Proceedings (Cat. No.99CH37050) (1999)
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