Advanced Formulation for DSA Resists
Nicolet, Celia, Chevalier, Xavier, Beausoleil, Julien, Sakavuyi, Kaumba, Berron, John, Brakensiek, Nick, Jurajda, Darron, Navarro, Christophe, Cayrefourcq, Ian
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
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Journal Article
DSA: Progress toward industry acceptance
VanderHeyden, Anthony, Jurajda, Darron, Guerrero, Douglas
Published in 2017 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2017)
Published in 2017 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) (01.04.2017)
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Conference Proceeding