Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir
Franz, Mathias, Junghans, Romy, Schmitt, Paul, Szeghalmi, Adriana, Schulz, Stefan E
Published in Beilstein journal of nanotechnology (23.09.2020)
Published in Beilstein journal of nanotechnology (23.09.2020)
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Journal Article
Advanced Carriers on Legacy CMP Tools - an Intelligent Solution for Flexible Production Environments and R&D Labs
Franz, Mathias, Schubert, Ina, Junghans, Romy, Martinka, Ronny, Rudolph, Catharina, Wachsmuth, Holger, Trojan, Dan, VanDevender, Barrie, Wrschka, Peter, Gottfried, Knut Christoph
Published in ECS transactions (28.07.2016)
Published in ECS transactions (28.07.2016)
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Journal Article
Fabrication of local areas of high aspect ratio silicon structures using metal-assisted chemical etching
Franz, Mathias, Junghans, Romy, Schulz, Stefan E.
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
Published in 2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM) (01.05.2023)
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Conference Proceeding
Temporary wafer bonding - key technology for MEMS devices
Wuensch, Dirk, Purwin, Lina, Buttner, Lars, Martinka, Ronny, Schubert, Ina, Junghans, Romy, Baum, Mario, Wiemer, Maik, Otto, Thomas
Published in 2017 Pan Pacific Microelectronics Symposium (Pan Pacific) (01.02.2017)
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Published in 2017 Pan Pacific Microelectronics Symposium (Pan Pacific) (01.02.2017)
Conference Proceeding
Advanced Carriers on Legacy CMP Tools - an Intelligent Solution for Flexible Production Environments and R&D Labs
Gottfried, Knut Christoph, VanDevender, Barrie, Trojan, Dan, Feeney, Paul, Schubert, Ina, Junghans, Romy, Martinka, Ronny, Franz, Mathias, Rudolph, Catharina, Wachsmuth, Holger
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
Published in Meeting abstracts (Electrochemical Society) (01.04.2016)
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Journal Article