Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: role of AlN buffer
Jung, Jun-Phil, Lee, Jin-Bock, Kim, Jung-Sun, Park, Jin-Seok
Published in Thin solid films (30.01.2004)
Published in Thin solid films (30.01.2004)
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Journal Article
Experimental and theoretical investigation on the relationship between AlN properties and AlN-based FBAR characteristics
Jun-Phil Jung, Jin-Bock Lee, Myung-Ho Lee, Jin-Seok Park
Published in IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 (2003)
Published in IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003 (2003)
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Conference Proceeding