The application of a heating baffle in a high temperature vacuum reactor
Kuei-Fang Chen, Jun-Ching Chiu, Chih-Kai Hu, Li, Tomi T., Pi-Chen Tung
Published in 2017 China Semiconductor Technology International Conference (CSTIC) (01.03.2017)
Published in 2017 China Semiconductor Technology International Conference (CSTIC) (01.03.2017)
Get full text
Conference Proceeding