by Asvany, Oskar, Krüger, Hanna, Schlemmer, Stephan
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2020)

by Lin, Chin-Yen, Wang, Li-Wen, Liao, Kuan-Hsun, Lo, Cheng-Yao
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.03.2017)

by Rifai, A., Maikap, S., YOSHIO NAKAMURA
Published in Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (01.09.2015)

by Alkemade, Paul F. A., Miro, Hozanna, van Veldhoven, Emile, Maas, Diederik J., Smith, Daryl A., Rack, Philip D.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2011)

by Raj, Abhishek, Kumar, Manish, Bherwani, Hemant, Gupta, Ankit, Anshul, Avneesh
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.01.2021)

by Harry, Katherine J., Strobel, Sebastian, Yang, Joel K. W., Duan, Huigao, Berggren, Karl K.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2011)

by Hlawacek, Gregor, Veligura, Vasilisa, van Gastel, Raoul, Poelsema, Bene
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01.03.2014)

by Burr, Geoffrey W., Shenoy, Rohit S., Virwani, Kumar, Narayanan, Pritish, Padilla, Alvaro, Kurdi, Bülent, Hwang, Hyunsang
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2014)

by Futase, Takuya, Tanioto, Hisanori, Kimoto, Mitsuo, Tsugane, Hideaki, Suzuki, Hidenori, Tobimatsu, Hiroshi
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.09.2011)

by Yoshifumi Ikoma, Yuta Nishino, Teruaki Motooka, Hafizal Yahaya, Hirofumi Sakita, Keiji Kuriyama
Published in Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (01.11.2011)

by Yang, Rui, Zheng, Xuqian, Wang, Zenghui, Miller, Christopher J., Feng, Philip X.-L.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2014)

by Shah, Dhruv, Patel, Dhananjay I., Roychowdhury, Tuhin, Rayner, G. Bruce, O’Toole, Noel, Baer, Donald R., Linford, Matthew R.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2018)

by Shukor, Anmar H., Alhattab, Haider A., Takano, Ichiro
Published in Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena (01.01.2020)

by Panghulan, Glenson R., Vasquez, Magdaleno R., Edañol, Yasmin D., Chanlek, Narong, Payawan, Leon M.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2020)

by Yang, Jiancheng, Ren, Fan, Khanna, Rohit, Bevlin, Kristen, Geerpuram, Dwarakanath, Tung, Li-Chun, Lin, Jingyu, Jiang, Hongxing, Lee, Jonathan, Flitsiyan, Elena, Chernyak, Leonid, Pearton, S. J., Kuramata, Akito
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.09.2017)

by Chen, Linghan, Ando, Daisuke, Sutou, Yuji, Koike, Junichi
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.05.2019)

by Iida, Shin-ichi, Terashima, Masahiro, Mamiya, Kazutoshi, Chang, Hsun-Yun, Sasaki, Shunsuke, Ono, Atsuo, Kimoto, Takahito, Miyayama, Takuya
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.07.2021)

by Carey, Patrick H., Yang, Jiancheng, Ren, Fan, Hays, David C., Pearton, Stephen J., Kuramata, Akito, Kravchenko, Ivan I.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2017)

by Jahangirli, Zakir A., Alizade, Elvin H., Aliev, Ziya S., Otrokov, Mikhail M., Ismayilova, Narmin A., Mammadov, Samir N., Amiraslanov, Imamaddin R., Mamedov, Nazim T., Orudjev, Guseyn S., Babanly, Mahammad B., Shikin, Alexander M., Chulkov, Evgueni V.
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.11.2019)

by Bhattacharya, Ranajoy, Karaulac, Nedeljko, Chern, Winston, Akinwande, Akintunde Ibitayo, Browning, Jim
Published in Journal of vacuum science and technology. B, Nanotechnology & microelectronics (01.03.2021)