Loading…
CMOS-Integrated Aluminum Nitride MEMS: A Review
Pinto, Rui M. R., Gund, Ved, Dias, Rosana Alves, Nagaraja, K. K., Vinayakumar, K. B.
Published in Journal of microelectromechanical systems (01.08.2022)
Published in Journal of microelectromechanical systems (01.08.2022)
Get full text
Journal Article
Loading…
Investigation of Multimodal Electret-Based MEMS Energy Harvester With Impact-Induced Nonlinearity
Tao, Kai, Tang, Lihua, Wu, Jin, Lye, Sun Woh, Chang, Honglong, Miao, Jianmin
Published in Journal of microelectromechanical systems (01.04.2018)
Published in Journal of microelectromechanical systems (01.04.2018)
Get full text
Journal Article
Loading…
A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4
Lu, Ruochen, Yang, Yansong, Link, Steffen, Gong, Songbin
Published in Journal of microelectromechanical systems (01.06.2020)
Published in Journal of microelectromechanical systems (01.06.2020)
Get full text
Journal Article
Loading…
Review of Micro Thermoelectric Generator
Yan, Jiabin, Liao, Xiaoping, Yan, Deyang, Chen, Youguo
Published in Journal of microelectromechanical systems (01.02.2018)
Published in Journal of microelectromechanical systems (01.02.2018)
Get full text
Journal Article
Loading…
A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films
Wang, Jialin, Park, Mingyo, Mertin, Stefan, Pensala, Tuomas, Ayazi, Farrokh, Ansari, Azadeh
Published in Journal of microelectromechanical systems (01.10.2020)
Published in Journal of microelectromechanical systems (01.10.2020)
Get full text
Journal Article
Loading…
MEMS Resonators for Frequency Reference and Timing Applications
Wu, Guoqiang, Xu, Jinghui, Ng, Eldwin Jiaqiang, Chen, Wen
Published in Journal of microelectromechanical systems (01.10.2020)
Published in Journal of microelectromechanical systems (01.10.2020)
Get full text
Journal Article
Loading…
Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators
Park, Mingyo, Hao, Zhijian, Dargis, Rytis, Clark, Andrew, Ansari, Azadeh
Published in Journal of microelectromechanical systems (01.08.2020)
Published in Journal of microelectromechanical systems (01.08.2020)
Get full text
Journal Article
Loading…
MEMS Laser Scanners: A Review
Holmstrom, Sven T. S., Baran, Utku, Urey, Hakan
Published in Journal of microelectromechanical systems (01.04.2014)
Published in Journal of microelectromechanical systems (01.04.2014)
Get full text
Journal Article
Loading…
Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators
Lu, Ruochen, Li, Ming-Huang, Yang, Yansong, Manzaneque, Tomas, Gong, Songbin
Published in Journal of microelectromechanical systems (01.04.2019)
Published in Journal of microelectromechanical systems (01.04.2019)
Get full text
Journal Article
Loading…
Loading…
Review of MEMS Electromagnetic Vibration Energy Harvester
Tan, Yushan, Dong, Ying, Wang, Xiaohao
Published in Journal of microelectromechanical systems (01.02.2017)
Published in Journal of microelectromechanical systems (01.02.2017)
Get full text
Journal Article
Loading…
4.5 GHz Lithium Niobate MEMS Filters With 10% Fractional Bandwidth for 5G Front-Ends
Yang, Yansong, Lu, Ruochen, Gao, Liuqing, Gong, Songbin
Published in Journal of microelectromechanical systems (01.08.2019)
Published in Journal of microelectromechanical systems (01.08.2019)
Get full text
Journal Article
Loading…
Characterization of Nontoxic Liquid-Metal Alloy Galinstan for Applications in Microdevices
Tingyi Liu, Sen, P., Chang-Jin Kim
Published in Journal of microelectromechanical systems (01.04.2012)
Published in Journal of microelectromechanical systems (01.04.2012)
Get full text
Journal Article
Loading…
Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density
Hyun-Cheol Song, Kumar, Prashant, Maurya, Deepam, Min-Gyu Kang, Reynolds, William T., Dae-Yong Jeong, Chong-Yun Kang, Priya, Shashank
Published in Journal of microelectromechanical systems (01.12.2017)
Published in Journal of microelectromechanical systems (01.12.2017)
Get full text
Journal Article
Loading…
What is the Young's Modulus of Silicon?
Hopcroft, M.A., Nix, W.D., Kenny, T.W.
Published in Journal of microelectromechanical systems (01.04.2010)
Published in Journal of microelectromechanical systems (01.04.2010)
Get full text
Journal Article
Loading…
Loading…
Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications
Dinh, Toan, Hoang-Phuong Phan, Qamar, Afzaal, Woodfield, Peter, Nam-Trung Nguyen, Dao, Dzung Viet
Published in Journal of microelectromechanical systems (01.10.2017)
Published in Journal of microelectromechanical systems (01.10.2017)
Get full text
Journal Article
Loading…
Loading…
Airborne Piezoelectric Micromachined Ultrasonic Transducers for Long-Range Detection
Luo, Guo-Lun, Kusano, Yuri, Horsley, David A.
Published in Journal of microelectromechanical systems (01.02.2021)
Published in Journal of microelectromechanical systems (01.02.2021)
Get full text
Journal Article
Loading…
An Acceleration Sensing Method Based on the Mode Localization of Weakly Coupled Resonators
Hemin Zhang, Boyang Li, Weizheng Yuan, Kraft, Michael, Honglong Chang
Published in Journal of microelectromechanical systems (01.04.2016)
Published in Journal of microelectromechanical systems (01.04.2016)
Get full text
Journal Article
Web Resource