Search Results - "Journal of microelectromechanical systems" :: K.UTB vyhledávací portál

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High-Depth FIB Etching on Silicon Sidewall: Coupling Incidence Angle and Initial Multi-Groove Surface Topography

by Dai, Jun, Wu, Zhiqin, He, Zhen, Sun, Yu, Zhao, Yonghua, Kometani, Reo
Published in Journal of microelectromechanical systems (01.06.2025)

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Deep Wet Etching of a Z-Cut α-Quartz Wafer by Fluorine-Based Solutions: Experiment, Mechanism, and Application

by Xue, Hong, Ai, Jiabin, Zhang, Zichao, Li, Bo, Bai, Bing, Li, Cun, Zhao, Yulong
Published in Journal of microelectromechanical systems (01.06.2025)

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Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment

by Li, Ke, Kim, Jae-Jun, Fernandes, Jayer, Jiang, Hongrui
Published in Journal of microelectromechanical systems (01.06.2025)

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Integrated Microfluidic System for Mechanical Agitation-Based Cell Lysis and Fluorescence Detection Using Reduced Amount of Reagent

by Peng, Zhen, Zhang, Zhimi, He, Ziyi, Teo, Adrian J. T., Long, Yihao, Tahir, Muhammad, Dai, Jun, Dong, Yixiao, He, Liang, Ho Holden Li, King
Published in Journal of microelectromechanical systems (01.06.2025)

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A Hybrid MEMS Microphone Combining Piezoelectric and Capacitive Transduction Mechanisms

by Guan, Yangyang, Sadeghpour, Sina, Wang, Chen, Zhang, Hemin, Joshi, Sanjog Vilas, Shojaeian, Milad, Wu, Xinyu, Ding, Ruochen, Glorieux, Christ, Kraft, Michael
Published in Journal of microelectromechanical systems (01.06.2025)

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Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution

by Shaskey, Cedric, Jarzembski, Amun, Birdwell, Milo, Park, Keunhan
Published in Journal of microelectromechanical systems (01.06.2025)

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MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation

by Ran, Longqi, Zhou, Wu, He, Jiangbo, Wu, Jiahao, Wang, Yan, Gong, Xuhui
Published in Journal of microelectromechanical systems (01.06.2025)

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Compact Multi-Point Quantum Magnetometer With a Molded Foaming 3D MEMS Vapor Cell for Magnetic Localization

by Zhang, Jianfeng, Shang, Jintang
Published in Journal of microelectromechanical systems (01.06.2025)

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Study on Mechanical Cross-Axis Coupling for Non-Follow-Up Tip-Tilt Vertical Comb-Drive Micromirror

by Xia, Yuhu, Ling, Biyun, Wang, Xiaoyue, Wu, Yaming
Published in Journal of microelectromechanical systems (01.06.2025)

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A Novel Three-State RF MEMS Switch Based on Origami Structure

by Han, Lei, Pan, Yutang, Liu, Saisai, Gao, Chuyuan, Cheng, Lifan
Published in Journal of microelectromechanical systems (01.06.2025)

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Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process

by Ruiz, Camila Sola, Salles do Nascimento, Valter, Fischer, Clovis, Hummel Cioldin, Frederico, Roberto Silva, Audrey, Alexandre Diniz, Jose
Published in Journal of microelectromechanical systems (01.06.2025)

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Demonstration of 1 Million Q -Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction

by Senkal, Doruk, Ahamed, Mohammed J., Ardakani, Mohammad H. Asadian, Askari, Sina, Shkel, Andrei M.
Published in Journal of microelectromechanical systems (01.02.2015)

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A ScAlN-Based Piezoelectric MEMS Microphone With Sector-Connected Cantilevers

by Hu, Bohao, Liu, Wenjuan, Yang, Chaoxiang, Lu, Liangyu, Wang, Zekai, Liu, Yan, Cai, Yao, Wang, Jian, Guo, Shishang, Sun, Chengliang
Published in Journal of microelectromechanical systems (01.12.2023)

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Piezoelectric Micromachined Ultrasonic Transducers With Superior Frequency Control

by Gong, Yi, Zhang, Menglun, Sun, Sheng, Guo, Wenlan, Sun, Chen, Pang, Wei
Published in Journal of microelectromechanical systems (01.12.2023)

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Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36°-Cut Lithium Niobate

by Stettler, Silvan, Villanueva, Luis Guillermo
Published in Journal of microelectromechanical systems (01.06.2023)

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Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study

by Lu, Ruochen, Yang, Yansong, Gong, Songbin
Published in Journal of microelectromechanical systems (01.12.2021)

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Optimization of Hemispherical Shell Resonator Structure Based on Thermoelastic Dissipation

by Sun, Xiaoyan, Chen, Haikuan, He, Zhouwei, Zheng, Haoning, Duan, Ji'an, Hu, Youwang
Published in Journal of microelectromechanical systems (01.04.2024)

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Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors

by Zhu, Hengbo, Cao, Yun, Ma, Wanli, Kong, Xiaoyu, Lei, Shenghong, Lu, Haining, Nie, Weirong, Xi, Zhanwen
Published in Journal of microelectromechanical systems (01.04.2024)

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An Intrinsically Temperature-Drift Suppression Phase-Locked Loop With MEMS Voltage Controlled Oscillator for Micromechanical Resonant Accelerometer

by Ma, Liangbo, Wang, Jiawei, Wang, Zheng, Wang, Kunfeng, Zhai, Zhaoyang, Cai, Pengcheng, Xiong, Xingyin, Zou, Xudong
Published in Journal of microelectromechanical systems (01.12.2022)

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Parallel in-Plane Electrothermal Actuators

by Ho, Yen Nee, Michael, Aron, Kwok, Chee Yee, Pulikkaseril, Cibby
Published in Journal of microelectromechanical systems (01.06.2024)

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