Search Results - "Journal of microelectromechanical systems" :: K.UTB vyhledávací portál

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Exploring Bias-Instability Noise Sources in Quadrature Error Compensation System for Mode-Split MEMS Gyroscopes

by Lin, Jie, Zhao, Yang, Qiu, Anping, Xia, Guoming, Shi, Qin
Published in Journal of microelectromechanical systems (01.08.2025)

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Toward a Tunable AlN-Based Piezoelectric MEMS Microphone: Design, Characterization, and Analysis

by Zheng, Zhuoyue, Wu, Xinyu, Wang, Yuan, Luo, Huahuang, Ke, Qingqing, Wang, Chen, Kraft, Michael, Martins, Rui P., Mak, Pui In
Published in Journal of microelectromechanical systems (01.08.2025)

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60-g FSR, 6-μg Stability FM Time-Switched Accelerometers Through Shaped Comb Fingers

by Pileri, Luca, Padovani, Christian, Gattere, Gabriele, Langfelder, Giacomo
Published in Journal of microelectromechanical systems (01.08.2025)

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Theory and Experimental Demonstration of Symmetrically Bistable MEMS Pin-Joint Buckled Beam

by Yasunaga, Shun, Ezawa, Motohiko, Mita, Yoshio
Published in Journal of microelectromechanical systems (01.08.2025)

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Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes

by Xie, Zihao, Le, Xianhao, Cao, Tengbo, Gao, Feng, Wan, Qing, Xie, Jin
Published in Journal of microelectromechanical systems (01.08.2025)

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Reduction of Motional Resistance Using Piezoelectric on Silicon MEMS Disk Arrays for Ambient Air Applications

by Ali, Abid, Tariq Balghari, Suaid, Wajih Ullah Siddiqi, Muhammad, Nabki, Frederic
Published in Journal of microelectromechanical systems (01.08.2025)

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Piezoresistive Angle Feedback Sensors With Various Schemes in MEMS Micromirrors

by Tu, Er-Qi, Fang, Xiao-Yong, Zhao, Fei, Wu, Jia-Hao, Zhang, Wen-Ming
Published in Journal of microelectromechanical systems (01.08.2025)

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A High-Performance Mechanically Coupled Quadruple Breathing Mode Ring Resonator

by Li, Bowen, Xiao, Yuhao, Li, Longlong, Hua, Zhaomin, Wu, Guoqiang
Published in Journal of microelectromechanical systems (01.08.2025)

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Fabrication, Electrochemical Characterization, and In Vivo Validation of a Flexible Neural Probe

by Freitas, Joao R., Rodrigues, Jose A., Machado, Joao L., Aguiar, Leandro A. A., Rodrigues, Ana J., Oliveira, Joao F., Correia, Jose H., Pimenta, Sara
Published in Journal of microelectromechanical systems (01.08.2025)

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High-Order Piezoelectric Micromachined Ultrasonic Transducer With Piezoelectric Layer Trench for Ultrasound Imaging

by Cai, Junxiang, Wang, Yiwei, Wu, Tao
Published in Journal of microelectromechanical systems (01.08.2025)

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Electro-Mechanical Frequency Response of a Piezo-MEMS Speaker Measured by Laser Diode Feedback Interferometry

by Anelli, Carlo, Merlo, Sabina
Published in Journal of microelectromechanical systems (01.08.2025)

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Development of a MEMS Thermal Flow Sensor With High Reliability and Universality for Various Gases

by Tian, Wei, Lin, Yuzhe, Wen, Lianggong, Xu, Maosen, Lin, Jinghua, Hu, Guoqing, Tao, Jifang
Published in Journal of microelectromechanical systems (01.08.2025)

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Toward Memristor-Like Resonant Sensors: Observation of Pinched Hysteresis Within MEMS Resonators

by Uka, Erion, Zhao, Chun
Published in Journal of microelectromechanical systems (01.08.2025)

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Defect Excitation and Failure Analysis of MEMS Gas Sensors Based on FTA and RET Methods

by Hao, Zenghui, Zhu, Minjie, Liu, Shuai, Chen, Fanhong, Liang, Tianxiang, Zhu, Kehan, Xia, Cao, Xia, Yuanlin, Du, Xiaohui, Wang, Zhuqing
Published in Journal of microelectromechanical systems (01.08.2025)

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Research on Parasitic Capacitance Reduction in All-Silicon High-Precision MEMS Accelerometers

by Zhao, Kunwei, Chen, Tianyou, Yang, Lujia, Wu, Wenjie, Hu, Chenyuan, Liu, Huafeng, Fan, Ji
Published in Journal of microelectromechanical systems (01.08.2025)

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Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror

by Song, Xudong, Qiao, Dayong, Song, Xiumin
Published in Journal of microelectromechanical systems (01.08.2025)

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Thermally Stable, BEOL-Configured MEMS-Based One-Time Programmable (OTP) Memory for Cryogenic Embedded Application

by Joshi, Khanjan Miteshkumar, Garg, Manu, Kumar, Nitish, Chiu, Yi, Singh, Pushpapraj
Published in Journal of microelectromechanical systems (01.08.2025)

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A Wireless Passive Pressure and Temperature Sensor via a Dual LC Resonant Circuit in Harsh Environments

by Tan, Qiulin, Luo, Tao, Wei, Tanyong, Liu, Jun, Lin, Liwei, Xiong, Jijun
Published in Journal of microelectromechanical systems (01.04.2017)

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Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser

by Hu, Youwang, Zheng, Haoning, Wang, Yao, Wang, Yalong, Sun, Xiaoyan, Duan, Ji'an
Published in Journal of microelectromechanical systems (01.02.2024)

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Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation

by Xi, Jingqian, Xu, Lei, Wang, Yuan, Liu, Huafeng, Xiong, Xingyin, Zou, Xudong, Li, Chengxin, Hu, Fangjing, Wang, Chen, Kraft, Michael, Zhao, Chun
Published in Journal of microelectromechanical systems (01.10.2023)

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