Search Results - "Journal of microelectromechanical systems" :: K.UTB vyhledávací portál

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Gallium Nitride as an Electromechanical Material

by Rais-Zadeh, Mina, Gokhale, Vikrant Jayant, Ansari, Azadeh, Faucher, Marc, Théron, Didier, Cordier, Yvon, Buchaillot, Lionel
Published in Journal of microelectromechanical systems (01.12.2014)

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1.3 mm2 Nav-Grade NEMS-Based Gyroscope

by Gadola, Marco, Buffoli, Andrea, Sansa, Marc, Berthelot, Audrey, Robert, Philippe, Langfelder, Giacomo
Published in Journal of microelectromechanical systems (01.08.2021)

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A Review of On-Chip Micro Supercapacitors for Integrated Self-Powering Systems

by Caiwei Shen, Sixing Xu, Yingxi Xie, Sanghadasa, Mohan, Xiaohong Wang, Liwei Lin
Published in Journal of microelectromechanical systems (01.10.2017)

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Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters

by Li, Mingjie, Luo, Anxin, Luo, Wenxin, Wang, Fei
Published in Journal of microelectromechanical systems (01.10.2022)

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Enabling Higher Order Lamb Wave Acoustic Devices With Complementarily Oriented Piezoelectric Thin Films

by Lu, Ruochen, Yang, Yansong, Link, Steffen, Gong, Songbin
Published in Journal of microelectromechanical systems (01.10.2020)

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Controlling Residual Stress and Suppression of Anomalous Grains in Aluminum Scandium Nitride Films Grown Directly on Silicon

by Beaucejour, Rossiny, Roebisch, Volker, Kochhar, Abhay, Moe, Craig G., Hodge, Michael David, Olsson, Roy H.
Published in Journal of microelectromechanical systems (01.08.2022)

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Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW

by Barrera, Omar, Cho, Sinwoo, Matto, Lezli, Kramer, Jack, Huynh, Kenny, Chulukhadze, Vakhtang, Chang, Yen-Wei, Goorsky, Mark S., Lu, Ruochen
Published in Journal of microelectromechanical systems (01.12.2023)

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Flexible Capacitive Tactile Sensor Array With Truncated Pyramids as Dielectric Layer for Three-Axis Force Measurement

by Liang, Guanhao, Wang, Yancheng, Mei, Deqing, Xi, Kailun, Chen, Zichen
Published in Journal of microelectromechanical systems (01.10.2015)

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Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter

by Zou, Yang, Cai, Yao, Gao, Chao, Luo, Tiancheng, Liu, Yan, Xu, Qinwen, Wang, Yaxin, Nian, Laixia, Liu, Wenjuan, Soon, Jeffrey Bo Woon, Sun, Chengliang
Published in Journal of microelectromechanical systems (01.06.2023)

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The Multi-Mode Resonance in AlN Lamb Wave Resonators

by Zou, Jie, Lin, Chih-Ming, Gao, Anming, Pisano, Albert P.
Published in Journal of microelectromechanical systems (01.12.2018)

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High Q Antisymmetric Mode Lithium Niobate MEMS Resonators With Spurious Mitigation

by Yang, Yansong, Lu, Ruochen, Gong, Songbin
Published in Journal of microelectromechanical systems (01.04.2020)

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Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers

by Yipeng Lu, Horsley, David A.
Published in Journal of microelectromechanical systems (01.08.2015)

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A Review on MEMS Silicon Resonant Accelerometers

by Zhang, Zhao, Zhang, Hemin, Hao, Yongcun, Chang, Honglong
Published in Journal of microelectromechanical systems (01.04.2024)

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A Parylene Neural Probe Array for Multi-Region Deep Brain Recordings

by Wang, Xuechun, Hirschberg, Ahuva Weltman, Xu, Huijing, Slingsby-Smith, Zachary, Lecomte, Aziliz, Scholten, Kee, Song, Dong, Meng, Ellis
Published in Journal of microelectromechanical systems (01.08.2020)

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High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators

by Shao, Shuai, Luo, Zhifang, Lu, Yuan, Mazzalai, Andrea, Tosi, Carlo, Wu, Tao
Published in Journal of microelectromechanical systems (01.06.2022)

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Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride

by Cho, Sinwoo, Barrera, Omar, Simeoni, Pietro, Marshall, Emily N., Kramer, Jack, Motoki, Keisuke, Hsu, Tzu-Hsuan, Chulukhadze, Vakhtang, Rinaldi, Matteo, Doolittle, W. Alan, Lu, Ruochen
Published in Journal of microelectromechanical systems (01.12.2023)

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On the Design and Modeling of a Full-Range Piezoelectric MEMS Loudspeaker for In-Ear Applications

by Gazzola, Chiara, Zega, Valentina, Cerini, Fabrizio, Adorno, Silvia, Corigliano, Alberto
Published in Journal of microelectromechanical systems (01.12.2023)

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C-Band Lithium Niobate on Silicon Carbide SAW Resonator With Figure-of-Merit of 124 at 6.5 GHz

by Hsu, Tzu-Hsuan, Campbell, Joshua, Kramer, Jack, Cho, Sinwoo, Li, Ming-Huang, Lu, Ruochen
Published in Journal of microelectromechanical systems (01.10.2024)

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X-Cut Lithium Niobate-Based Shear Horizontal Resonators for Radio Frequency Applications

by Kochhar, Abhay, Mahmoud, Ashraf, Shen, Yuyi, Turumella, Nihar, Piazza, Gianluca
Published in Journal of microelectromechanical systems (01.12.2020)

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Monolithic Multiband MEMS RF Front-End Module for 5G Mobile

by Campanella, Humberto, Qian, You, Romero, Christian O., Wong, Jen Shuang, Giner, Joan, Kumar, Rakesh
Published in Journal of microelectromechanical systems (01.02.2021)

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