Study of physisorption phenomena of chemical species on 300 mm Si wafers during controlled mini-environment transfers between microelectronic equipments
Pelissier, B., Labau, S., Martin, M., Petit-Etienne, C., Fontaine, H., Baron, T., Joubert, O.
Published in Microelectronic engineering (15.07.2020)
Published in Microelectronic engineering (15.07.2020)
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Journal Article
Materials science. The cutting edge of plasma etching
Lill, Thorsten, Joubert, Olivier
Published in Science (American Association for the Advancement of Science) (22.02.2008)
Published in Science (American Association for the Advancement of Science) (22.02.2008)
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Journal Article
Water incorporation and proton conductivity in titanium substituted barium indate
Quarez, Eric, Noirault, Samuel, Caldes, Maria Teresa, Joubert, Olivier
Published in Journal of power sources (15.02.2010)
Published in Journal of power sources (15.02.2010)
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Journal Article
Electricity production from lignocellulosic biomass by direct coupling of a gasifier and a nickel/yttria-stabilized zirconia-based solid oxide fuel cell: influence of the H2S content of the syngas onto performances and aging
Ricoul, F., Subrenat, A., Joubert, O., Le Gal La Salle, A.
Published in Journal of solid state electrochemistry (01.09.2018)
Published in Journal of solid state electrochemistry (01.09.2018)
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Journal Article
Mechanisms involved in HBr and Ar cure plasma treatments applied to 193 nm photoresists
Pargon, E., Menguelti, K., Martin, M., Bazin, A., Chaix-Pluchery, O., Sourd, C., Derrough, S., Lill, T., Joubert, O.
Published in Journal of applied physics (01.05.2009)
Published in Journal of applied physics (01.05.2009)
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Journal Article
Processing two visual categories at once: "OR" is easy, but "AND" takes time
Joubert, O. R., Ruiz, M. J., Fabre-Thorpe, M.
Published in Journal of vision (Charlottesville, Va.) (03.09.2010)
Published in Journal of vision (Charlottesville, Va.) (03.09.2010)
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Journal Article
Microstructure and electrical characterizations of yttrium oxide and yttrium silicate thin films deposited by pulsed liquid-injection plasma-enhanced metal-organic chemical vapor deposition
Durand, C., Dubourdieu, C., Vallée, C., Loup, V., Bonvalot, M., Joubert, O., Roussel, H., Renault, O.
Published in Journal of applied physics (01.08.2004)
Published in Journal of applied physics (01.08.2004)
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Journal Article
Water incorporation into the (Ba(1-x)Lax)(2)In2O5+x square(1-x) (0 <= x < 0.6) system
Noirault, S., Celerier, S., Joubert, O. R., Caldes, Maria Teresa, Piffard, Y.
Published in Solid state ionics (01.08.2007)
Published in Solid state ionics (01.08.2007)
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Journal Article
Intermediate temperature solid oxide fuel cell based on BaIn0.3Ti0.7O2.85 electrolyte
PRAKASH, D, DELAHAYE, T, JOUBERT, O, CALDES, M.-T, PIFFARD, Y
Published in Journal of power sources (01.05.2007)
Published in Journal of power sources (01.05.2007)
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Journal Article
Patterning of narrow porous SiOCH trenches using a TiN hard mask
Darnon, M., Chevolleau, T., Eon, D., Bouyssou, R., Pelissier, B., Vallier, L., Joubert, O., Posseme, N., David, T., Bailly, F., Torres, J.
Published in Microelectronic engineering (01.11.2008)
Published in Microelectronic engineering (01.11.2008)
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Journal Article
Synthesis and characterization of a Ni/Ba2In0.6Ti1.4O5.7 rectangle(0.3) cermet for SOFC application
Delahaye, T., Joubert, O. R., Caldes, Maria Teresa, Piffard, Y., Stevens, P.
Published in Solid state ionics (15.11.2006)
Published in Solid state ionics (15.11.2006)
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Journal Article
Plasma etching of HfO2 in metal gate CMOS devices
SUNGAUER, E, MELLHAOUI, X, PARGON, E, JOUBERT, O
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article