PILLAR ARRAY STRUCTURE WITH UNIFORM AND HIGH ASPECT RATIO NANOMETER GAPS
WANG, CHAO, SMITH, JOSHUA, THOMAS, WUNSCH, BENJAMIN, HARDY, BRUCE, ROBERT, LAWSON, ASTIER, YANN, ANDRE
Year of Publication 02.06.2016
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Year of Publication 02.06.2016
Patent
Pillar array structure with uniform and high aspect ratio nanometer gaps
SMITH JOSHUA THOMAS, ASTIER YANN ANDRE, WUNSCH BENJAMIN HARDY, BRUCE ROBERT LAWSON, WANG CHAO
Year of Publication 18.08.2017
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Year of Publication 18.08.2017
Patent