Surface reaction kinetics of CH3 in CH4 RF discharge studied by time-resolved threshold ionization mass spectrometry
SHIRATANI, M, JOLLY, J, VIDELOT, H, PERRIN, J
Published in Japanese journal of applied physics (01.07.1997)
Published in Japanese journal of applied physics (01.07.1997)
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Conference Proceeding
Surface Reaction Kinetics of CH 3 in CH 4 RF Discharge Studied by Time-Resolved Threshold Ionization Mass Spectrometry
Masaharu Shiratani, Masaharu Shiratani, Jacques Jolly, Jacques Jolly, Hervé Videlot, Hervé Videlot, Jérôme Perrin, Jérôme Perrin
Published in Japanese Journal of Applied Physics (01.07.1997)
Published in Japanese Journal of Applied Physics (01.07.1997)
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Journal Article
Mass Spectrometry Detection of SiH m and CH m Radicals from SiH 4 –CH 4 –H 2 RF Discharges under High Temperature Deposition Conditions of Silicon Carbide
Kae-Nune, Patrick, Perrin, Jérôme, Jean Guillon, Jean Guillon, Jacques Jolly, Jacques Jolly
Published in Japanese Journal of Applied Physics (01.07.1994)
Published in Japanese Journal of Applied Physics (01.07.1994)
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Journal Article
Two-dimensional modelling of SiH4-H2 radio-frequency discharges for a-Si:H deposition
LEROY, O, GOUSSET, G, LEMOS ALVES, L, PERRIN, J, JOLLY, J
Published in Plasma sources science & technology (1998)
Published in Plasma sources science & technology (1998)
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Journal Article
Electrical Characterization of Capacitively Coupled Radio Frequency Discharges in Hydrogen
Marques, Luís S. A., Jolly, Jacques, Alves, Luís L.
Published in Plasma processes and polymers (01.04.2007)
Published in Plasma processes and polymers (01.04.2007)
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Journal Article
Spatiotemporal analysis of the double layer formation in hydrogen radio frequency discharges
Leroy, O, Stratil, P, Perrin, J, Jolly, J, Belenguer, P
Published in Journal of physics. D, Applied physics (14.03.1995)
Published in Journal of physics. D, Applied physics (14.03.1995)
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Journal Article
Two-dimensional modelling of - radio-frequency discharges for a-Si:H deposition
Leroy, Olivier, Gousset, Gérard, Alves, Luís Lemos, Perrin, Jérôme, Jolly, Jacques
Published in Plasma sources science & technology (01.08.1998)
Published in Plasma sources science & technology (01.08.1998)
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Journal Article
VERFAHREN ZUM STAPELN VON EINER LICHTLEITFASERVORFORM
TUTIN, ERIC, FAUCHE, REMI, JOLLY, JACQUES, CAMPION, JEAN-FLORENT, HERCHUELZ, VIRGINIE
Year of Publication 15.11.2010
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Year of Publication 15.11.2010
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