Effects of substrate temperature and substrate material on the structure of reactively sputtered TiN films
Hibbs, M.K., Johansson, B.O., Sundgren, J.-E., Helmersson, U.
Published in Thin solid films (01.01.1984)
Published in Thin solid films (01.01.1984)
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Journal Article
Influence of substrate shape on TiN films prepared by reactive sputtering
Johansson, B.O., Sundgren, J.-E., Hentzell, H.T.G., Karlsson, S.-E.
Published in Thin solid films (01.01.1984)
Published in Thin solid films (01.01.1984)
Get full text
Journal Article