Highly ordered freestanding titanium oxide nanotube arrays using Si-containing block copolymer lithography and atomic layer deposition
Ku, Se Jin, Jo, Gyeong Cheon, Bak, Chang Hong, Kim, Su Min, Shin, Yu Ri, Kim, Kwang Ho, Kwon, Se Hun, Kim, Jin-Baek
Published in Nanotechnology (01.03.2013)
Published in Nanotechnology (01.03.2013)
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Journal Article
Circular Double‐Patterning Lithography Using a Block Copolymer Template and Atomic Layer Deposition
Wan, Zhixin, Lee, Ha Jin, Kim, Hyun Gu, Jo, Gyeong Cheon, Park, Woon Ik, Ryu, Seung Wook, Lee, Han‐Bo‐Ram, Kwon, Se‐Hun
Published in Advanced materials interfaces (23.08.2018)
Published in Advanced materials interfaces (23.08.2018)
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Journal Article
Atomic Layer Deposition: Circular Double‐Patterning Lithography Using a Block Copolymer Template and Atomic Layer Deposition (Adv. Mater. Interfaces 16/2018)
Wan, Zhixin, Lee, Ha Jin, Kim, Hyun Gu, Jo, Gyeong Cheon, Park, Woon Ik, Ryu, Seung Wook, Lee, Han‐Bo‐Ram, Kwon, Se‐Hun
Published in Advanced materials interfaces (01.08.2018)
Published in Advanced materials interfaces (01.08.2018)
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Journal Article
Fabrication of versatile nanoporous templates with high aspect ratios by incorporation of Si-containing block copolymer into the lithographic bilayer system
Kim, Su Min, Ku, Se Jin, Jo, Gyeong Cheon, Pak, Chang Hong, Kim, Jin-Baek
Published in Polymer (Guilford) (09.05.2012)
Published in Polymer (Guilford) (09.05.2012)
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Journal Article
Ultrahigh density sub-10 nm TiO 2 nanosheet arrays with high aspect ratios via the spacer-defined double-patterning process
Bak, Chang Hong, Ku, Se Jin, Jo, Gyeong Cheon, Jung, Kyoungok, Lee, Ha Jin, Kwon, Se Hun, Kim, Jin-Baek
Published in Polymer (Guilford) (01.03.2015)
Published in Polymer (Guilford) (01.03.2015)
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Journal Article
Ultrahigh density sub-10 nm TiO2 nanosheet arrays with high aspect ratios via the spacer-defined double-patterning process
Bak, Chang Hong, Ku, Se Jin, Jo, Gyeong Cheon, Jung, Kyoungok, Lee, Ha Jin, Kwon, Se Hun, Kim, Jin-Baek
Published in Polymer (Guilford) (09.03.2015)
Published in Polymer (Guilford) (09.03.2015)
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Journal Article