Design of silicon membranes for ultrasonic transducers and its fabrication by anisotropic wet etching
Malohatko, S V, Gusev, E Yu, Jityaeva, J Y, Ageev, O A
Published in Journal of physics. Conference series (01.12.2020)
Published in Journal of physics. Conference series (01.12.2020)
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Journal Article
Multi-electrode silicon microprobes fabrication process for brain-computer interface
Gusev, E Yu, Jityaeva, J Y, Malohatko, S V, Ageev, O A
Published in Journal of physics. Conference series (01.12.2020)
Published in Journal of physics. Conference series (01.12.2020)
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Journal Article
Effect of substrate temperature on the properties of plasma deposited silicon oxide thin films
Gusev, E Yu, Jityaeva, J Y, Avdeev, S P, Ageev, O A
Published in Journal of physics. Conference series (01.12.2018)
Published in Journal of physics. Conference series (01.12.2018)
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Journal Article
Nanocomposite of polycrystalline silicon and carbon nanotubes for micro- and nanomechanical systems
Gusev, E Yu, Jityaeva, J Y, Rudyk, N N, Ageev, O A
Published in Journal of physics. Conference series (01.12.2018)
Published in Journal of physics. Conference series (01.12.2018)
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Journal Article
The formation of multi-axis micromechanical gyroscopes and accelerometers using surface micromachining
Gusev, E Yu, Jityaeva, J Y, Bykov, Al V
Published in Journal of physics. Conference series (01.11.2017)
Published in Journal of physics. Conference series (01.11.2017)
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Journal Article